A Novel Scheduling Approach to Dual-Arm Cluster Tools with Wafer Revisiting

被引：0
作者：
Wu, NaiQi [1 ]
Zhou, MengChu [2 ]
机构：
[1] Guangdong Univ Technol, Dept Ind Engn, Guangzhou 510006, Guangdong, Peoples R China
[2] New Jersey Inst Technol, Dept Elect & Comp Engn, Newark, NJ 07102 USA
来源：
PROCEEDINGS 2012 IEEE INTERNATIONAL CONFERENCE ON SYSTEMS, MAN, AND CYBERNETICS (SMC) | 2012年
关键词：
Petri nets; scheduling; cluster tool; semiconductor manufacturing; TIMED PETRI NETS; PERFORMANCE; DEADLOCK;
D O I：
暂无
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
It has been shown that, for dual-arm cluster tools with wafer revisiting, a swap strategy may not be optimal. To improve the performance of such a system, a Petri net model is developed in this work. Based on it, dynamical behavior of the wafer production process is analyzed. Then, two new scheduling methods called 2-wafer cyclic schedules are presented. Cycle time analysis shows that, under some conditions, the performance obtained by the 2-wafer cyclic schedules is better than that obtained by a swap strategy. Thus, the methods presented in this paper and the swap strategy can be used to complement each other in optimally scheduling dual-arm cluster tools with wafer revisiting. Illustrative examples are presented to show the results.
引用
收藏
页码：1213 / 1218
页数：6
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