Systematic studies for improving device performance of quantum well infrared stripe photodetectors

被引:14
作者
Hainey, Mel F., Jr. [1 ]
Mano, Takaaki [1 ]
Kasaya, Takeshi [1 ]
Ochiai, Tetsuyuki [1 ]
Osato, Hirotaka [1 ]
Watanabe, Kazuhiro [1 ]
Sugimoto, Yoshimasa [1 ]
Kawazu, Takuya [1 ]
Arai, Yukinaga [1 ]
Shigetou, Akitsu [1 ]
Miyazaki, Hideki T. [1 ]
机构
[1] Natl Inst Mat Sci, Tsukuba, Ibaraki 3050047, Japan
基金
日本学术振兴会;
关键词
etching; infrared photodetector; intersubband transition; metasurface; plasmonic cavity; quantum well; OPTICAL-PROPERTIES; GAAS;
D O I
10.1515/nanoph-2020-0095
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The integration of quantum well infrared photodetectors with plasmonic cavities has allowed for demonstration of sensitive photodetectors in the mid-infrared up to room-temperature operating conditions. However, clear guidelines for optimizing device structure for these detectors have not been developed. Using simple stripe cavity detectors as a model system, we clarify the fundamental factors that improve photodetector performance. By etching semiconductor material between the stripes, the cavity resonance wavelength was expected to blue-shift, and the electric field was predicted to strongly increase, resulting in higher responsivity than unetched stripe detectors. Contrary to our predictions, etched stripe detectors showed lower responsivities, indicating surface effects at the sidewalls and reduced absorption. Nevertheless, etching led to higher detectivity due to significantly reduced detector dark current. These results suggest that etched structures are the superior photodetector design, and that appropriate sidewall surface treatments could further improve device performance. Finally, through polarization and incidence angle dependence measurements of the stripe detectors, we clarify how the design of previously demonstrated wired patch antennas led to improved device performance. These results are widely applicable for cavity designs over a broad range of wavelengths within the infrared, and can serve as a roadmap for improving next-generation infrared photodetectors.
引用
收藏
页码:3373 / 3384
页数:12
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