Characterization of ozone sensors based on WO3 reactively sputtered films:: influence O2 concentration in the sputtering gas and working temperature

被引：102
作者：
Bendahan, M [1 ]
Boulmani, R [1 ]
Seguin, JL [1 ]
Aguir, K [1 ]
机构：
[1] Fac Sci & Tech St Jerome, UMR 6137 CNRS, L2MP, Lab Mat & Microelect,Serv 152, F-13397 Marseille 20, France
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2004年 / 100卷 / 03期
关键词：
WO3; gas sensors ozone; thin films; reactive sputtering;
D O I：
10.1016/j.snb.2004.01.023
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
We report on electrical responses of tungsten oxide thin film ozone sensors based on a tungsten trioxide (WO3)/tin oxide (SiO2)/Si structure with interdigitated Pt electrodes. The influence of O-2 concentration in the sputtering gas and working temperature of the sensor are investigated. Sensitivity to ozone increases with O-2 content in the sputtering gas. It reaches its highest value for sensors fabricated with 50% O-2. For these sensors, the best ozone sensitivity and shortest response and recovery times are obtained at a working temperature of 523 K. Ozone sensitivity is compared to other ozone sensors. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：320 / 324
页数：5
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