Ultralow Contact Resistance at an Epitaxial Metal/Oxide Heterojunction Through Interstitial Site Doping

被引:28
作者
Chambers, Scott A. [1 ]
Gu, Meng [2 ]
Sushko, Peter V. [4 ,5 ]
Yang, Hao [3 ]
Wang, Chongmin [2 ]
Browning, Nigel D. [1 ]
机构
[1] Pacific NW Natl Lab, Fundamental & Computat Sci Directorate, Richland, WA 99352 USA
[2] Pacific NW Natl Lab, Environm Mol Sci Lab, Richland, WA 99352 USA
[3] Univ Calif Davis, Dept Chem Engn & Mat Sci, Davis, CA 95616 USA
[4] UCL, Dept Phys & Astron, London WC1E 6BT, England
[5] UCL, London Ctr Nanotechnol, London WC1E 6BT, England
基金
英国工程与自然科学研究理事会;
关键词
metal; oxide interfaces; ohmic contacts; scanning transmission electron microscopy; x-ray and ultraviolet photoemission; first-principles modeling; CR CLUSTERS; SRTIO3; GROWTH; FILMS; OXIDE;
D O I
10.1002/adma.201301030
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Heteroepitaxial growth of Cr metal on Nb-doped SrTiO3(001) is accompanied by Cr diffusion to interstitial sites within the first few atomic planes, an anchoring of the Cr film to the substrate, charge transfer from Cr to Ti, and metallization of the near-surface region, as depicted in the figure. The contact resistance of the resulting interface is exceedingly low. Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:4001 / 4005
页数:5
相关论文
共 30 条
[1]  
Akasaka S., 2010, NAT MAT, V9, P889
[2]   Improvement of Electron Mobility above 100,000 cm2 V-1 s-1 in MgxZn1-xO/ZnO Heterostructures [J].
Akasaka, Shunsuke ;
Tsukazaki, Atsushi ;
Nakahara, Ken ;
Ohtomo, Akira ;
Kawasaki, Masashi .
JAPANESE JOURNAL OF APPLIED PHYSICS, 2011, 50 (08)
[3]  
[Anonymous], 2006, APPL PHYS LETT, V88
[4]  
BADER RFW, 1990, ATOMS MOL A QUANTUM
[5]   Epitaxial Cr on n-SrTiO3(001)-An ideal Ohmic contact [J].
Capan, C. ;
Sun, G. Y. ;
Bowden, M. E. ;
Chambers, S. A. .
APPLIED PHYSICS LETTERS, 2012, 100 (05)
[6]  
Daulton TL, 2001, MICROSC MICROANAL, V7, P470
[7]   Determination of chromium valence over the range Cr(0)-Cr(VI) by electron energy loss spectroscopy [J].
Daulton, Tyrone L. ;
Little, Brenda J. .
ULTRAMICROSCOPY, 2006, 106 (07) :561-573
[8]   Metal/oxide interfacial reactions:: Oxidation of metals on SrTiO3 (100) and TiO2 (110) [J].
Fu, Q ;
Wagner, T .
JOURNAL OF PHYSICAL CHEMISTRY B, 2005, 109 (23) :11697-11705
[9]   Diffusion-corrected simultaneous multilayer growth model [J].
Fu, Q ;
Wagner, T .
PHYSICAL REVIEW LETTERS, 2003, 90 (10) :4
[10]   Nucleation and growth of Cr clusters and films on (100) SrTiO3 surfaces [J].
Fu, Q ;
Wagner, T .
THIN SOLID FILMS, 2002, 420 :455-460