The microstructure, mechanical and tribological properties of TiN coatings after Nb and C ion implantation

被引：30

作者：

Deng, Bin ^{[1
]}

Tao, Ye ^{[1
]}

Hu, Zhijie ^{[1
]}

机构：

[1] Beihang Univ, Sch Mat Sci & Engn, Beijing 100191, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2013年 / 284卷

关键词：

TiN; Ion implantation; Tribological properties; Magnetic filter arc ion plating; CORROSION BEHAVIOR; THIN-FILMS; NITROGEN; SURFACE; CARBON; STEEL; HARDNESS; ARC; CRN; ZR;

D O I：

10.1016/j.apsusc.2013.07.112

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In this study, Nb and C ions are co-implanted into the TiN coatings, deposited by magnetic filter arc ion plating (MFAIP), using a metal vacuum vapor arc (MEVVA) ion source implantor with doses of 1 x 10(17) and 5 x 10(17) ions/cm(2). The microstructure and chemical compositions of the TiN coatings implanted with Nb and C ions have been investigated by means of glancing incidence X-ray diffraction (GIXRD) and X-ray photoelectron spectroscopy (XPS). Meanwhile, the mechanical and tribological properties of the TiN coatings have been studied by nano-indentation test and SRV friction and wear tester. The results show that the hardness and plastic deformation resistance of TiN coatings increased remarkably after ion implantation due to the energetic Nb and C ions bombardment and the formation of NbN and TiC phase. Nb ion implantation can effectively improve the wear resistance of the TiN coatings and the Nb + C dual ion implantation shows a better wear behavior due to a carbonaceous layer formed in the implanted zone of the TiN coatings after C ion implantation. (C) 2013 Elsevier B. V. All rights reserved.

引用

页码：405 / 411

页数：7

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