Structure and high-frequency soft-magnetic properties of Co-TiN nano-composite films

被引：5

作者：

Zhang, Yiwen ^{[1
]}

Kijima, Hanae ^{[1
]}

Kobayashi, Nobukiyo ^{[2
]}

Ohnuma, Shigehiro ^{[1
,2
]}

Masumoto, Hiroshi ^{[1
]}

机构：

[1] Tohoku Univ, Interdisciplinary Res Ctr, Sendai, Miyagi 9828578, Japan

[2] Res Inst Electromagnet Mat, Sendai, Miyagi 9820807, Japan

来源：

JOURNAL OF THE CERAMIC SOCIETY OF JAPAN | 2013年 / 121卷 / 1409期

关键词：

Nano-composite films; Soft magnetic property; High frequency permeability; Noise suppressor; GRANULAR THIN-FILMS; ANISOTROPY DISPERSION; RANGE;

D O I：

10.2109/jcersj2.121.36

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The interest in the soft magnetic nano-composite films has grown to realize down-sized microelectronic devices at GHz frequency. In this study, the good soft magnetic Co-TiN nano-composite films were successfully prepared at room temperature (RT) by a sputtering method. XPS results prove that the Co in the films is pure metallic state. The nano-composite films show good frequency response of permeability, which resonance frequency is as high as 1.3 GHz. The films have high magnetic loss absorption (P-loss/P-in) around 1.5 GHz range, which have a high potential for noise suppressors in high frequency devices. (C)2013 The Ceramic Society of Japan. All rights reserved.

引用

页码：36 / 39

页数：4

共 18 条

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