Structural study of micro and nanotubes synthesized by rapid thermal chemical vapor deposition

The structures of micro and nanotubes obtained by pyrolysis of hydrocarbons, hold onto silicon (Si) substrates, are reported in this work. The tubes fabrication experiments were carried out by Rapid Thermal Chemical Vapor Deposition (RTCVD) using propane (C3H8) as carbon (C) precursor. Selection of parameters such as temperature of deposition, vacuum conditions or surface cleaning leads to the creation of tubular structures. Transmission electron microscopy (TEM), scanning electron microscopy (SEM), selected area electron diffraction (SAED) and energy dispersive X-ray measurements (EDX) are the microbeam techniques that allow to characterize the tubes found in the studied specimens. Different tube configurations such as isolated nanorods, Y-type junctions or fiber-like layers are evidenced. Metallic catalysis seems to be the mechanism involved in the wires formation since Fe particles are present inside the CNT tubes. Other poly-crystal line inclusions are also evidenced by SAED. The composition of the nanotubes changes from tip to tail in an amorphous matrix. The growth mechanisms leading to tube formation are described.