Flexible thin-film polymer waveguides fabricated in an industrial roll-to-roll process

被引:37
作者
Bruck, R. [1 ]
Muellner, P. [1 ]
Kataeva, N. [1 ]
Koeck, A. [1 ]
Trassl, S. [2 ]
Rinnerbauer, V. [2 ]
Schmidegg, K. [2 ]
Hainberger, R. [1 ]
机构
[1] Austrian Inst Technol GmbH, A-1220 Vienna, Austria
[2] Hueck Folien GmbH, Baumgartenberg, Austria
关键词
HOT-EMBOSSING PROCESS; NANOIMPRINT LITHOGRAPHY; OPTICAL INTERCONNECTS; EFFICIENT; COUPLER;
D O I
10.1364/AO.52.004510
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The fabrication of flexible low-loss, thin-film, foil-based polymer waveguides with grating couplers employing a high-volume industrial roll-to-roll process is demonstrated. The embossed waveguides feature propagation losses of less than 1 dB/cm (633 nm, TE polarization), bending losses of 0.4-0.8 dB/360 degrees for bending radii as small as 2 mm, and grating coupling efficiencies of up to 25%. In addition, the waveguides possess a thermo-optic coefficient of -1.58 x 10(-4) 1/degrees C. The fabricated waveguides are promising candidates for short-distance data communication as well as for sensing applications. (C) 2013 Optical Society of America
引用
收藏
页码:4510 / 4514
页数:5
相关论文
共 20 条
[1]   High-speed roll-to-roll nanoimprint lithography on flexible plastic substrates [J].
Ahn, Se Hyun ;
Guo, L. Jay .
ADVANCED MATERIALS, 2008, 20 (11) :2044-+
[2]   Bilayer metal wire-grid polarizer fabricated by roll-to-roll nanoimprint lithography on flexible plastic substrate [J].
Ahn, Se Hyun ;
Kim, Jin-Sung ;
Guo, L. Jay .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2007, 25 (06) :2388-2391
[3]   Large-Area Roll-to-Roll and Roll-to-Plate Nanoimprint Lithography: A Step toward High-Throughput Application of Continuous Nanoimprinting [J].
Ahn, Se Hyun ;
Guo, L. Jay .
ACS NANO, 2009, 3 (08) :2304-2310
[4]   Highly Reliable Flexible Active Optical Links [J].
Bosman, Erwin ;
Van Steenberge, Geert ;
Van Hoe, Bram ;
Missinne, Jeroen ;
Vanfleteren, Jan ;
Van Daele, Peter .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2010, 22 (05) :287-289
[5]   Efficient small grating couplers for low-index difference waveguide systems [J].
Bruck, Roman ;
Hainberger, Rainer .
INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XIII, 2009, 7218
[6]   Efficient coupling of narrow beams into polyimide waveguides by means of grating couplers with high-index coating [J].
Bruck, Roman ;
Hainberger, Rainer .
APPLIED OPTICS, 2010, 49 (10) :1972-1978
[7]   Ultraviolet embossing for patterning high aspect ratio polymeric microstructures [J].
Chan-Park, MB ;
Neo, WK .
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2003, 9 (6-7) :501-506
[8]   Flexible optical waveguide film fabrications and optoelectronic devices integration for fully embedded board-level optical interconnects [J].
Choi, CC ;
Lin, L ;
Liu, YJ ;
Choi, JH ;
Wang, L ;
Haas, D ;
Magera, J ;
Chen, RT .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 2004, 22 (09) :2168-2176
[9]   Fabrication of large-core 1 x 16 optical power splitters in polymers using hot-embossing process [J].
Choi, CG ;
Han, SP ;
Kim, BC ;
Ahn, SH ;
Jeong, MY .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2003, 15 (06) :825-827
[10]   Efficient and tolerant resonant grating coupler for multimode optical interconnections [J].
Destouches, N. ;
Blanc, D. ;
Franc, J. ;
Tonchev, S. ;
Hendrickx, N. ;
Van Daele, P. ;
Parriaux, O. .
OPTICS EXPRESS, 2007, 15 (25) :16870-16879