Simultaneous flow and thermal conductivity measurement of gases utilizing a calorimetric flow sensor

被引：25

作者：

Romero, Diego F. Reyes ^{[1
]}

Kogan, K. ^{[1
]}

Cubukcu, Ali S. ^{[1
,3
]}

Urban, Gerald A. ^{[1
,2
]}

机构：

[1] Univ Freiburg, Lab Sensors, Dept Microsyst Engn IMTEK, D-79110 Freiburg, Germany

[2] Univ Freiburg, Freiburg Inst Adv Studies FRIAS, D-79104 Freiburg, Germany

[3] Aselsan Inc, Micro Nano Devices Design Dept, Microelect Guidance & Electroopt Div, TR-06011 Ankara, Turkey

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2013年 / 203卷

关键词：

Flow sensor; Thermal flow sensor; Thermal conductivity; Oscillatory excitation; SIMULATION; DIFFUSIVITY; LIQUIDS; FLUID;

D O I：

10.1016/j.sna.2013.08.025

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This contribution presents a calorimetric flow sensor that is capable of determining the thermal conductivity of gases (k) under flow conditions. The measuring principle relies on using high frequency heat generation at 200 Hz in order to confine the AC heat transfer into a thin region over the surface of the channel wall, where the flow velocity profile is always close to zero. The thermal conductivity of several common gases and their mixtures is measured for flow rates up to 750 sccm. The sensor takes advantage of DC excitation to measure the flow rate (Q) provided that the volumetric heat capacity (pc(p)) or the thermal diffusivity (alpha =k/(pc(p))) of the gas is known. This paper also presents two analytical models that qualitatively describe the measuring principles. Theoretically predicted functions fit well the experimental results.

引用

页码：225 / 233

页数：9

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