X-ray diffraction and X-ray reflectivity applied to investigation of thin films

An overview of X-ray scattering methods used for analysis of the real structure of thin films is presented that includes conventional diffraction, glancing angle X-ray diffraction, X-ray reflectivity measurement and grazing incidence Xray diffraction. The capability of the above techniques is illustrated on two typical examples: investigation of real structure of polycrystalline thin films and study of interface morphology and atomic ordering in periodic multilayers.