ZrO2 powders and films with 5, 8, 9 and 10 mol % of Pr2O3 were prepared by a modified sol-gel method using liquid precursors. The thermal stability of the different phases is crucial in order to use this material in devices such as fuel cells, where the appearance of unwanted spurious phases causes a negative impact in the efficiency of such devices. DTA-TG and HT-XRD analysis carried out on the powders show that crystallization takes place around 500 degrees C. Heat treatments over 1000 degrees C produces destabilization of the initial crystallization cubic phase in the powders as well as in the films. However, aging treatments consisting in thermal cycles between room temperature and 750 degrees C, which is the temperature of technological interest, do not affect the structure, the microstructure and the stresses state of the Pr-doped ZO(2) thin films. (C) 2012 Published by Elsevier Ltd. Selection and/or peer-review under responsibility of SAM/CONAMET 2011, Rosario, Argentina.