Silicon-on-insulator microphotonic devices

被引:0
|
作者
Vivien, Laurent [1 ]
Cassan, Eric [1 ]
Marris-Morini, Delphine [1 ]
Maine, Sylvain [1 ]
Rouviere, Mathieu [1 ]
Damlencourt, Jean-Francois [1 ]
Fedeli, Jean-Marc [1 ]
Lupu, Anatole [1 ]
Pascal, Daniel [1 ]
Le Roux, Xavier [1 ]
Laval, Suzanne [1 ]
机构
[1] Univ Paris 11, CNRS, UMR 8622, Inst Elect Fondamentale, F-91405 Orsay, France
关键词
microphotonic devices; Silicon on insulator; optical waveguides; optical interconnects; optical modulator; germanium photodetector;
D O I
暂无
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
SOI microwaveguides and associated devices (splitters, turns,...) are used for light distribution. Rib SOI geometries obtained by shallow etching of the silicon film offer definite advantages for the integration of active devices while fulfilling efficiency and compactness. Propagation losses of such waveguides are one order of magnitude smaller than for single mode strip waveguides. Rib-based compact and low loss optical signal distribution from one input to up to 1024 output points has been demonstrated. Light injection in submicron SOI waveguides is discussed. The indirect bandgap of silicon is not in favor of light emission and modulation. Realization of silicon sources and efficient high speed silicon-based modulators is a real challenge. For light detection, germanium can be grown on silicon and Ge photodetectors with -3dB bandwidths up to 30 GHz have been demonstrated.
引用
收藏
页码:XXV / XXXVIII
页数:14
相关论文
共 50 条
  • [31] Triboelectric charging damage in silicon-on-insulator devices
    Tangyunyong, Paiboon
    Electronic Device Failure Analysis, 2021, 23 (03): : 4 - 7
  • [32] Radiation hardness of silicon-on-insulator pixel devices
    Hara, Kazuhiko
    Aoyagi, Wataru
    Sekigawa, Daisuke
    Iwanami, Shikie
    Honda, Shunsuke
    Tsuboyama, Toru
    Arai, Yasuo
    Kurachi, Ikuo
    Miyoshi, Toshinobu
    Yamada, Miho
    Ikegami, Yoichi
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2019, 924 : 426 - 430
  • [33] Diamond based silicon-on-insulator materials and devices
    Bengtsson, S
    Bergh, M
    PERSPECTIVES, SCIENCE AND TECHNOLOGIES FOR NOVEL SILICON ON INSULATOR DEVICES, 2000, 73 : 97 - 107
  • [34] OPTICAL TECHNIQUES FOR DETECTING DEFECTS IN SILICON-ON-INSULATOR DEVICES
    SUNSHINE, RA
    RCA REVIEW, 1971, 32 (02): : 263 - &
  • [35] Analytical heat flow modeling of silicon-on-insulator devices
    Cheng, MC
    Yu, FX
    Habitz, P
    Ahmadi, G
    SOLID-STATE ELECTRONICS, 2004, 48 (03) : 415 - 426
  • [36] Nanophotonic devices based on silicon-on-insulator nanowire waveguides
    Wosinski, Lech
    ICTON 2006: 8TH INTERNATIONAL CONFERENCE ON TRANSPARENT OPTICAL NETWORKS, VOL 1, PROCEEDINGS: ICTON, MPM, INDUSTRIAL, PICAW, GOWN, 2006, : 206 - 209
  • [37] Low-noise silicon-on-insulator hall devices
    Haddab, Y
    Mosser, V
    Lysowec, M
    Suski, J
    Demeus, L
    Renaux, C
    Adriaensen, S
    Flandre, D
    FLUCTUATION AND NOISE LETTERS, 2004, 4 (02): : L345 - L354
  • [38] The advancement of silicon-on-insulator (SOI) devices and their basic properties
    Rudenko, T. E.
    Nazarov, A. N.
    Lysenko, V. S.
    SEMICONDUCTOR PHYSICS QUANTUM ELECTRONICS & OPTOELECTRONICS, 2020, 23 (03) : 227 - 252
  • [39] Recent advances in silicon microphotonic devices
    Cheben, P.
    Delage, A.
    Densmore, A.
    Janz, S.
    Lamontagne, B.
    Lapointe, J.
    Post, E.
    Schmid, J.
    Waldron, P.
    Xu, D. -X.
    REVISTA CUBANA DE FISICA, 2008, 25 (2A): : 75 - 80
  • [40] Total Ionization Damage Effects in Double Silicon-on-Insulator Devices
    Honda, S.
    Hara, K.
    Asano, M.
    Maeda, T.
    Tobita, N.
    Arai, Y.
    Miyoshi, T.
    Ohno, M.
    Hatsui, T.
    Tsuru, T.
    Miura, N.
    Kasai, H.
    Okihara, M.
    2013 IEEE NUCLEAR SCIENCE SYMPOSIUM AND MEDICAL IMAGING CONFERENCE (NSS/MIC), 2013,