Design and Fabrication of a Multi-Axis MEMS Force Sensor with Integrated Carbon Nanotube Based Piezoresistors

被引：0
|
作者：
Cullinan, Michael A. [1 ]
Panas, Robert M. [1 ]
Culpepper, Martin L. [1 ]
机构：
[1] MIT, Dept Mech Engn, 77 Massachusetts Ave,Room 35-135, Cambridge, MA 02139 USA
来源：
NANOTECHNOLOGY 2011: ELECTRONICS, DEVICES, FABRICATION, MEMS, FLUIDICS AND COMPUTATIONAL, NSTI-NANOTECH 2011, VOL 2 | 2011年
关键词：
Carbon Nanotube; Force Sensor; Piezoresistor; MEMS; HexFlex;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Carbon nanotube-based strain sensors have the potential to overcome many of the limitations in small-scale force/displacement sensing technologies due to their small size and high strain sensitivity. In this paper, we will present the design and fabrication of a multi-axis MEMS force sensor with integrated carbon nanotube based piezoresistive sensors. We will show that through proper sensor design and fabrication it is possible to improve the performance of these sensors by several orders of magnitude and produce nanoscale sensors with a dynamic range of greater than 80 dB. Overall, the force sensor presented in this paper has a resolution of 5.6 nN and a range up to 84 mu N.
引用
收藏
页码：302 / 305
页数：4
相关论文
共 50 条
  • [31] A Research of Multi-axis Force Sensor Static Decoupling Method Based on Neural Network
    Cao, Huibin
    Yu, Yong
    Ge, Yunjian
    2009 IEEE INTERNATIONAL CONFERENCE ON AUTOMATION AND LOGISTICS ( ICAL 2009), VOLS 1-3, 2009, : 875 - 879
  • [32] Design and Characterization of a Novel T-Shaped Multi-Axis Piezoresistive Force/Moment Sensor
    Zhang, Wei
    Lua, Kim Boon
    Van Tien Truong
    Senthil, Kumar A.
    Lim, Tee Tai
    Yeo, Khoon Seng
    Zhou, Guangya
    IEEE SENSORS JOURNAL, 2016, 16 (11) : 4198 - 4210
  • [33] A cost effective multi-axis force sensor for large scale measurement: design, modeling, and simulation
    Jiang, Jun
    Chen, Weihai
    Liu, Jingmeng
    Chen, Wenjie
    PROCEEDINGS OF THE 2013 IEEE 8TH CONFERENCE ON INDUSTRIAL ELECTRONICS AND APPLICATIONS (ICIEA), 2013, : 188 - 193
  • [34] Design, Simulation and Fabrication of MEMS Lorentz Force Sensor
    Sue, Chung-Yang
    Chiu, Sheng-Ren
    Tsai, Chun-Yin
    Chen, Shi
    Kuo, Chin-Fu
    Lee, Tzung-Ching
    Hsiao, Chieh-Ling
    2014 9TH INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY AND CIRCUITS TECHNOLOGY CONFERENCE (IMPACT), 2014, : 414 - 417
  • [35] Design of Multi-Axis Aircraft Based on Embedded
    Li, Kun
    Zhao, Yan
    Xing, Xiaozhu
    FRONTIERS OF MANUFACTURING SCIENCE AND MEASURING TECHNOLOGY V, 2015, : 17 - 22
  • [36] Multi-Axis Foot Reaction Force/Torque Sensor for Biomedical Applications
    Lind, Randall F.
    Love, Lonnie J.
    Rowe, John C.
    Pin, Francois G.
    2009 IEEE-RSJ INTERNATIONAL CONFERENCE ON INTELLIGENT ROBOTS AND SYSTEMS, 2009, : 2575 - 2579
  • [37] Analysis and design of integrated control for multi-axis motion systems
    Yeh, SS
    Hsu, PL
    IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, 2003, 11 (03) : 375 - 382
  • [38] Novel static decoupling algorithm for the multi-axis wheel force sensor based on the Informer network
    Chen, Peiyang
    Li, Yuzheng
    Gao, Hao
    Zhang, Xiaolong
    Du, Heng
    Ren, Tianyu
    MEASUREMENT, 2025, 241
  • [39] Calibration of multi-axis MEMS force sensors using the shape from motion method
    Sun, Yu
    Kim, Keekyoung
    Voyles, Richard M.
    Nelson, Bradley J.
    2006 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION (ICRA), VOLS 1-10, 2006, : 269 - +
  • [40] NON-CLEANROOM FABRICATION OF CARBON NANOTUBE-BASED MEMS FORCE AND DISPLACEMENT SENSORS
    Cullinan, Michael A.
    Panas, Robert M.
    Daniel, Cody R.
    Gafford, Joshua B.
    Culpepper, Martin L.
    PROCEEDINGS OF THE ASME INTERNATIONAL DESIGN ENGINEERING TECHNICAL CONFERENCES AND COMPUTERS AND INFORMATION IN ENGINEERING CONFERENCE, VOL 7, 2012, : 425 - 431
12345