Epitaxially grown molybdenum thin films deposited by laser ablation on (100)MgO substrates

被引：4

作者：

GuillouxViry, M ^{[1
]}

Perrin, A ^{[1
]}

Padiou, J ^{[1
]}

Sergent, M ^{[1
]}

Rossel, C ^{[1
]}

机构：

[1] IBM CORP,ZURICH RES LAB,CH-8803 RUSCHLIKON,SWITZERLAND

来源：

THIN SOLID FILMS | 1996年 / 280卷 / 1-2期

关键词：

epitaxy; laser ablation; molybdenum;

D O I：

10.1016/0040-6090(95)08213-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We report here on the deposition process by laser ablation and on the characterization of molybdenum films epitaxially grown on (100)MgO single-crystal substrates. The 50 nm (100)Mo films are epitaxied. These films have a low resistivity (similar to 5.3 mu Ohm cm at 273 K) close to the pure molybdenum resistivity value (4.85 mu Ohm cm at 273 K). The low resistivity corroborates the quality of the Mo films in spite of a very low deposition rate (similar to 25 nm h(-1)). An other orientation has been also encountered. The complementary characterization methods (X-ray diffraction in theta-2 theta or oscillating crystal mode, reflection high-energy electron diffraction and electron channelling patterns) have shown it to be the (110)Mo orientation.

引用

页码：76 / 82

页数：7

共 50 条

[31] Growth of SrRuO3 thin films on MgO substrates by pulsed laser ablation
Singh, SK
Lees, MR
Singh, RK
Palmer, SB
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2002, 35 (18) : 2243 - 2246
[32] Giant step bunching on SrTiO3 thin films grown epitaxially on vicinal MgO (100) surfaces
Youssef, Azza Hadj
Kolhatkar, Gitanjali
Amaechi, Ifeanyichukwu C.
Katoch, Rajesh
Gonzalez, Yoandris
Merlen, Alexandre
Ruediger, Andreas
APPLIED SURFACE SCIENCE, 2021, 570
[33] Flux pinning properties of YBCO thin films deposited on SrTiO3(100) and MgO(100) substrates
Horide, T
Matsumoto, K
Osamura, K
Ichinose, A
Mukaida, M
Yoshida, Y
Horii, S
PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS, 2004, 412 : 1291 - 1295
[34] Electronic and crystalline structures of zero band-gap LuPdBi thin films grown epitaxially on MgO(100)
Shan, Rong
Ouardi, Siham
Fecher, Gerhard H.
Gao, Li
Kellock, Andrew
Roche, Kevin P.
Samant, Mahesh G.
ViolBarbosa, Carlos E.
Ikenaga, Eiji
Felser, Claudia
Parkin, Stuart S. P.
APPLIED PHYSICS LETTERS, 2013, 102 (17)
[35] Residual Strain in Epitaxially-grown PbTiO3 and PZT Films Prepared on (100)MgO Substrates by MOCVD
1600,
[36] RESIDUAL STRAIN IN EPITAXIALLY-GROWN PBTIO3 AND PZT FILMS PREPARED ON (100)MGO SUBSTRATES BY MOCVD
OTSU, M
FUNAKUBO, H
HIOKE, T
AKAI, T
SHINOZAKI, K
MIZUTANI, N
NIPPON KAGAKU KAISHI, 1995, (10) : 789 - 795
[37] ZnS thin films grown on Si(100) by XeCl pulsed laser ablation
Hillie, KT
Curren, C
Swart, HC
APPLIED SURFACE SCIENCE, 2001, 177 (1-2) : 73 - 77
[38] Microstructural and electrical properties of MgO thin films grown on p-GaAs (100) substrates
Kim, TW
You, YS
MATERIALS RESEARCH BULLETIN, 2001, 36 (3-4) : 747 - 754
[39] Morphology of epitaxially grown BaRuO3 and CaRuO3 thin films by laser ablation
Ito, Akihiko
Masumoto, Hiroshi
Goto, Takashi
INNOVATION IN CERAMICS SCIENCE AND ENGINEERING, 2007, 352 : 315 - +
[40] Change of growth orientation in Pt films epitaxially grown on MgO(001) substrates by sputtering
Kun Ho Ahn
Sunggi Baik
Sang Sub Kim
Journal of Materials Research, 2002, 17 : 2334 - 2338

← 1 2 3 4 5 →