Camphor-Based CVD Bilayer Graphene/Si Heterostructures for Self-Powered and Broadband Photodetection

被引:11
|
作者
Tsai, Dung-Sheng [1 ]
Chiang, Ping-Yu [1 ]
Tsai, Meng-Lin [2 ]
Tu, Wei-Chen [3 ]
Chen, Chi [4 ]
Chen, Shih-Lun [1 ]
Chiu, Ching-Hsueh [1 ,5 ]
Li, Chen-Yu [5 ]
Uen, Wu-Yih [1 ]
机构
[1] Chung Yuan Christian Univ, Dept Elect Engn, Taoyuan 32023, Taiwan
[2] Natl Taiwan Univ Sci & Technol, Dept Mat Sci & Engn, Taipei 10607, Taiwan
[3] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 70101, Taiwan
[4] Acad Sinica, Res Ctr Appl Sci, Taipei 11529, Taiwan
[5] Xsense Technol Corp, Miaoli County 35053, Taiwan
关键词
graphene; camphor-based CVD; self-power photodetector; Si PDs; CHEMICAL-VAPOR-DEPOSITION; HIGH-RESPONSIVITY; HIGH-PERFORMANCE; RAMAN-SPECTROSCOPY; NANOROD-ARRAY; SINGLE-LAYER; SCHOTTKY; HETEROJUNCTION; FILM;
D O I
10.3390/mi11090812
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
This work demonstrates a self-powered and broadband photodetector using a heterojunction formed by camphor-based chemical vaper deposition (CVD) bilayer graphene on p-Si substrates. Here, graphene/p-Si heterostructures and graphene layers serve as ultra-shallow junctions for UV absorption and zero bandgap junction materials (<Si bandgap (1.1 eV)) for long-wave near-infrared (LWNIR) absorption, respectively. According to the Raman spectra and large-area (16 x 16 mu m(2)) Raman mapping, a low-defect, >95% coverage bilayer and high-uniformity graphene were successfully obtained by camphor-based CVD processes. Furthermore, the carrier mobility of the camphor-based CVD bilayer graphene at room temperature is 1.8 x 10(3) cm(2)/V center dot s. Due to the incorporation of camphor-based CVD graphene, the graphene/p-Si Schottky junctions show a good rectification property (rectification ratio of similar to 110 at +/- 2 V) and good performance as a self-powered (under zero bias) photodetector from UV to LWNIR. The photocurrent to dark current ratio (PDCR) value is up to 230 at 0 V under white light illumination, and the detectivity (D*) is 8 x 10(12) cmHz(1/2)/W at 560 nm. Furthermore, the photodetector (PD) response/decay time (i.e., rise/fall time) is similar to 118/120 mu s. These results support the camphor-based CVD bilayer graphene/Si Schottky PDs for use in self-powered and ultra-broadband light detection in the future.
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页数:13
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