共 50 条
- [23] Sub-10 nm Carbon Nanotube Transistor 2011 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), 2011,
- [25] Challenges of SEM metrology at sub-10 nm METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXVI, PTS 1 AND 2, 2012, 8324
- [26] Challenges for sub-10 nm CMOS devices 2006 INTERNATIONAL WORKSHOP ON NANO CMOS, PROCEEDINGS, 2006, : 125 - 127
- [27] Sub-10 nm imprint lithography and applications 55TH ANNUAL DEVICE RESEARCH CONFERENCE, DIGEST - 1997, 1997, : 90 - 91
- [29] Design with Sub-10 nm FinFET Technologies 2017 IEEE CUSTOM INTEGRATED CIRCUITS CONFERENCE (CICC), 2017,
- [30] Sub-10 nm imprint lithography and applications Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 1997, 15 (06):