Q-Switched Nd: YAG Laser Micro-Machining System

被引：0
|
作者：
Messaoud, S. [1 ]
Allam, A. [1 ]
Siserir, F. [1 ]
Bouceta, Y. [1 ]
Kerdja, T. [1 ]
Ouadjaout, D. [2 ]
机构：
[1] Ctr Dev Technol Avancees, Cite 20,Aout 1956, Algiers 16303, Algeria
[2] Unite Dev Technol Siliclum, Algiers, Algeria
来源：
LASER AND PLASMA APPLICATIONS IN MATERIALS SCIENCE | 2008年 / 1047卷
关键词：
photo masks; Nd: YAG laser; laser ablation; laser micromachining; laser writing;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper, we present the design of a low cost Q-switched Nd: YAG laser micro-machining system for photo masks fabrication. It consists of Nd:YAG laser source, beam delivery system, X-Y table, PC, The CCD camera and TV monitor. The synchronization between the laser source and the X-Y table is realised by NI PCI-7342, the two axis MID-7602 and LabVIEW based program. The first step of this work consists of engraving continuous and discontinuous lines on a thin film metal with a 100 mu m resolution by using the YG 980 Quantel Q-switched Nd:YAG laser.
引用
收藏
页码：111 / +
页数：2
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