Selective growth of diamond and carbon nanostructures by hot filament chemical vapor deposition

被引：22

作者：

Yang, Q ^{[1
]}

Xiao, C ^{[1
]}

Chen, W ^{[1
]}

Hirose, A ^{[1
]}

机构：

[1] Univ Saskatchewan, Plasma Phys Lab, Saskatoon, SK S7N 5E2, Canada

来源：

基金：

加拿大自然科学与工程研究理事会;

关键词：

diamond films; nanotubes; hot filament CVD; nanocones; selective growth;

D O I：

10.1016/j.diamond.2003.11.076

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond and carbon nanostructures have been synthesized selectively on differently pretreated silicon substrates by hot filament chemical vapor deposition in a CH4/H-2 gas mixture. Under typical conditions for CVD diamond deposition, carbon nanotube and diamond films have been selectively grown on nickel coated and diamond powder scratched silicon surface, respectively. By initiating a DC glow discharge between the filament and the substrate holder (cathode), well aligned carbon nanotube and nanocone films have been selectively synthesized on nickel coated and uncoated silicon substrates, respectively. By patterning, the nickel film on silicon substrate, pattern growth of diamond and nanotubes has been successfully achieved. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：433 / 437

页数：5

共 50 条

[41] Synthesis of nanocrystalline diamond films by DC plasma-assisted argon-rich hot filament chemical vapor deposition
Uppireddi, Kishore
Weiner, Brad R.
Morell, Gerardo
DIAMOND AND RELATED MATERIALS, 2008, 17 (01) : 55 - 59
[42] Influence of geometry factors of in situ dc glow discharge on the diamond nucleation in a hot-filament chemical vapor deposition system
Zhang, GF
Buck, V
SURFACE & COATINGS TECHNOLOGY, 2000, 132 (2-3) : 256 - 261
[43] Two-dimensional simulation of a hot-filament chemical vapor deposition reactor
Mankelevich, YA
Rakhimov, AT
Suetin, NV
DIAMOND AND RELATED MATERIALS, 1996, 5 (09) : 888 - 894
[44] Synthesis of multiwalled carbon nanotubes at temperatures below 300°C by hot-filament assisted chemical vapor deposition
Ishikawa, Y
Jinbo, H
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2005, 44 (12-15): : L394 - L397
[45] Temperature effects on growth of boron nitride thin films by a hot filament assisted rf plasma chemical vapor deposition
Ma, XY
Yang, JM
He, DY
Chen, GH
THIN SOLID FILMS, 1998, 322 (1-2) : 37 - 40
[46] Diamond nucleation and growth by hot-filament CVD with in situ DC glow discharge at a lower deposition pressure
Zhang, GF
Buck, V
MATERIALS LETTERS, 1999, 41 (05) : 261 - 265
[47] Low Temperature Growth of Carbon Nanostructures by Radio Frequency-Plasma Enhanced Chemical Vapor Deposition (Low Temperature Growth of Carbon Nanostructures by RF-PECVD)
Rao, B. Purna Chandra
Maheswaran, R.
Ramaswamy, Shivaraman
Mahapatra, Ojas
Gopalakrishanan, C.
Thiruvadigal, D. John
FULLERENES NANOTUBES AND CARBON NANOSTRUCTURES, 2009, 17 (06) : 625 - 635
[48] Catalytic growth mechanism and catalyst effects on electron field emission of nitrogenated carbon nanorods formed by plasma-enhanced hot filament chemical vapor deposition
Yan, Yunpeng
Zheng, Kun
Wang, Jiangjing
Zheng, Mupeng
Wang, Biben
Quan, Xuejun
VACUUM, 2014, 101 : 283 - 290
[49] Investigation of a Hot Filament Diamond Deposition by in situ Infrared Absorption
崔景彪
HighTechnologyLetters, 1996, (01) : 72 - 76
[50] Fabrication and growth mechanism of carbon nanospheres by chemical vapor deposition
Tian, F.
He, C. N.
MATERIALS CHEMISTRY AND PHYSICS, 2010, 123 (2-3) : 351 - 355

← 1 2 3 4 5 →