Characterization of a GaN bipolar junction transistor after operation at 300 for over 300 h

被引:60
|
作者
Yoshida, S [1 ]
Suzuki, J [1 ]
机构
[1] Furukawa Elect Corp Ltd, Yokohama Res & Dev Labs, Nishi Ku, Yokohama, Kanagawa 2200073, Japan
来源
关键词
GaN; bipolar junction transistor (BJT); reliability; gas-source molecular beam epitaxy (GSMBE); high-temperature operation;
D O I
10.1143/JJAP.38.L851
中图分类号
O59 [应用物理学];
学科分类号
摘要
GaN with an n-p-n structure was grown using gas-source molecular beam epitaxy (GSMBE). We fabricated an n-p-n GaN bipolar junction transistor. The high-temperature reliability of the bipolar junction transistor (BJT) was investigated. That is, the lifetime performance of the BJT at 300 degrees C was examined during continuous current injection at 300 degrees C. We confirmed that the performance of the bipolar transistor at 300 degrees C did not change for over 300 h. No degradation of the metal-semiconductor interface was observed by transmission electron microscopy (TEM). The reliability of the GaN BJT at 300 degrees C was thus confirmed.
引用
收藏
页码:L851 / L853
页数:3
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