Contact Resistance at MoS2-Based 2D Metal/Semiconductor Lateral Heterojunctions

被引:24
作者
Houssa, Michel [1 ]
Iordanidou, Konstantina [2 ]
Dabral, Ashish [1 ,3 ]
Lu, Augustin [4 ]
Pourtois, Geoffrey [3 ]
Afanasiev, Valeri [1 ]
Stesmans, Andre [1 ]
机构
[1] Univ Leuven, Dept Phys & Astron, B-3001 Leuven, Belgium
[2] Univ Oslo, Dept Phys, NO-0316 Oslo, Norway
[3] Imec, Kapeldreef 75, B-3001 Leuven, Belgium
[4] AIST, MathAM OIL, Sendai, Miyagi 9808577, Japan
关键词
2D metal/semiconductor heterostructures; graphene; transition metal dichalcogenides; first-principles simulations; electronic transport properties; 2-DIMENSIONAL MATERIALS; TRANSITION; HETEROSTRUCTURES; TRANSISTOR; JUNCTIONS;
D O I
10.1021/acsanm.8b01963
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The contact resistance at lateral 1T-MoS2/2H-MoS2 heterostructures is theoretically studied, using firstprinciples simulations based on density functional theory and the nonequilibrium Green's function method. The computed contact resistance lies between 30 and 40 k Omega mu m and is weakly dependent on the contact edge symmetry (armchair or zigzag). These values are about 2 orders of magnitude larger than the experimental ones reported recently on MoS2-based metal/semiconductor lateral heterojunctions. This discrepancy can be explained by considering the interaction of 1T-MoS2 with various chemical species (H, Li, or H2O) present during the local transformation of semiconducting 2H-MoS2 into metallic 1T-MoS2. The functionalization of 1T-MoS2 by these atoms or molecules results in the decrease of its workfunction, leading to contact resistances in the range of few hundred Omega mu m.
引用
收藏
页码:760 / 766
页数:13
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