Vapor-phase growth of high-quality wafer-scale two-dimensional materials

被引:58
|
作者
Tong, Xin [1 ]
Liu, Keli [2 ]
Zeng, Mengqi [1 ]
Fu, Lei [1 ,2 ]
机构
[1] Wuhan Univ, Coll Chem & Mol Sci, Wuhan 430072, Peoples R China
[2] Wuhan Univ, Inst Adv Studies IAS, Wuhan, Peoples R China
基金
中国国家自然科学基金;
关键词
two-dimensional materials; vapor-phase growth; wafer scale; SINGLE-CRYSTAL GRAPHENE; TRANSITION-METAL DICHALCOGENIDES; DEPOSITION GROWTH; EVOLUTIONARY SELECTION; MOLYBDENUM-DISULFIDE; MONOLAYER GRAPHENE; GRAIN-BOUNDARIES; LIQUID-METAL; RAPID GROWTH; MOS2;
D O I
10.1002/inf2.12038
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Emerging two-dimensional (2D) materials have stimulated tremendous scientific and industrial interests due to their diverse and tunable physical, chemical, and mechanical properties. The scalable production of high-quality wafer-scale 2D materials has become significantly essential to bring us closer to practical industrial applications, particularly in electronic devices. Vapor-phase growth provides attractive opportunities for the synthesis of large-area and high-quality 2D materials. In this review, we will emphasize vapor-phase growth strategies from three aspects, including suppressing nucleation, seamless stitching, and evolutionary selection growth. We discuss the general understanding of the related fundamental mechanism and specific parameter optimization from precursors and substrate design to the adjusting of growth parameters (temperature and pressure). Meanwhile, we present other strategies to produce various kinds of wafer-scale 2D materials. Finally, we conclude the current challenges and future directions in this developing field. This work may inspire researchers to better design routes in the synthesis of wafer-scale 2D materials with high quality.
引用
收藏
页码:460 / 478
页数:19
相关论文
共 50 条
  • [31] Reliable wafer-scale integration of two-dimensional materials and metal electrodes with van der Waals contacts
    Zhang, Xiaodong
    Huang, Chenxi
    Li, Zeyu
    Fu, Jun
    Tian, Jiaran
    Ouyang, Zhuping
    Yang, Yuliang
    Shao, Xiang
    Han, Yulei
    Qiao, Zhenhua
    Zeng, Hualing
    NATURE COMMUNICATIONS, 2024, 15 (01)
  • [32] Vapor-solid interfacial reaction and polymerization for wafer-scale uniform and ultrathin two-dimensional organic films
    Yao, Wenqian
    Yang, He
    Zhang, Qingsong
    Shi, Longxian
    Sun, Jianzhe
    Guo, Yunlong
    Jiang, Lang
    Wu, Bin
    Liu, Yunqi
    SCIENCE CHINA-MATERIALS, 2022, 65 (06) : 1577 - 1585
  • [33] C-Plane Sapphire and Catalyst Confinement Enable Wafer-Scale High-Quality Graphene Growth
    Lampert, Lester F.
    Caudillo, Roman
    Lindner, Thomas
    Jiao, Jun
    JOURNAL OF PHYSICAL CHEMISTRY C, 2016, 120 (46): : 26498 - 26507
  • [34] Engineering Wafer-Scale Epitaxial Two-Dimensional Materials through Sapphire Template Screening for Advanced High-Performance Nanoelectronics
    Shi, Yuanyuan
    Groven, Benjamin
    Serron, Jill
    Wu, Xiangyu
    Mehta, Ankit Nalin
    Minj, Albert
    Sergeant, Stefanie
    Han, Han
    Asselberghs, Inge
    Lin, Dennis
    Brems, Steven
    Huyghebaert, Cedric
    Morin, Pierre
    Radu, Iuliana
    Caymax, Matty
    ACS NANO, 2021, 15 (06) : 9482 - 9494
  • [35] Wafer-scale integration of two-dimensional perovskite oxides towards motion recognition
    Deng, Ming
    Li, Ziqing
    Liu, Shiyuan
    Fang, Xiaosheng
    Wu, Limin
    NATURE COMMUNICATIONS, 2024, 15 (01)
  • [36] HIGH-QUALITY INALAS GROWN BY ORGANOMETALLIC VAPOR-PHASE EPITAXY
    AINA, L
    MATTINGLY, M
    APPLIED PHYSICS LETTERS, 1987, 51 (20) : 1637 - 1639
  • [37] METALORGANIC VAPOR-PHASE EPITAXY FOR HIGH-QUALITY ACTIVE LAYERS
    NAKANISI, T
    SEMICONDUCTORS AND SEMIMETALS, 1990, 30 : 105 - 155
  • [38] Preparation of single-crystal metal substrates for the growth of high-quality two-dimensional materials
    Li, Yanglizhi
    Sun, Luzhao
    Liu, Haiyang
    Wang, Yuechen
    Liu, Zhongfan
    INORGANIC CHEMISTRY FRONTIERS, 2021, 8 (01) : 182 - 200
  • [39] Epitaxial Growth of Wafer-Scale Molybdenum Disulfide/Graphene Heterostructures by Metal-Organic Vapor-Phase Epitaxy and Their Application in Photodetectors
    Hoang, Anh Tuan
    Katiyar, Ajit K.
    Shin, Heechang
    Mishra, Neeraj
    Forti, Stiven
    Coletti, Camilla
    Ahn, Jong-Hyun
    ACS APPLIED MATERIALS & INTERFACES, 2020, 12 (39) : 44335 - 44344
  • [40] Manufacturing strategies for wafer-scale two-dimensional transition metal dichalcogenide heterolayers
    Wang, Mengjing
    Li, Hao
    Ko, Tae-Jun
    Sumaiya Shawkat, Mashiyat
    Okogbue, Emmanuel
    Yoo, Changhyeon
    Han, Sang Sub
    Islam, Md Ashraful
    Oh, Kyu Hwan
    Jung, Yeonwoong
    JOURNAL OF MATERIALS RESEARCH, 2020, 35 (11) : 1350 - 1368