Impact of High-k Gate Dielectric on Self-Heating Effects in PiFETs Structure

被引:14
作者
Belkhiria, Maissa [1 ]
Echouchene, Fraj [1 ]
Jaba, Nejeh [1 ]
Bajahzar, Abdullah [2 ]
Belmabrouk, Hafedh [1 ,3 ]
机构
[1] Univ Monastir, Fac Sci Monastir, Lab Elect & Microelect, Monastir 5019, Tunisia
[2] Majmaah Univ, Dept Comp Sci & Informat, Coll Sci Zulfi, Al Majmaah 15341, Saudi Arabia
[3] Majmaah Univ, Dept Phys, Coll Sci Zulfi, Al Majmaah 15341, Saudi Arabia
关键词
Bulk-metal-oxide-semiconductor field-effect transistors (bulk-MOSFETs); electrothermal model; high-k dielectrics; numerical simulation; partially insulated field-effect transistors (PiFETs); self-heating; FIELD-EFFECT TRANSISTORS; NANOSCALE MOSFET; MODEL; RELIABILITY; PERFORMANCE; TRANSPORT;
D O I
10.1109/TED.2020.3012418
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this article, we propose a 2-D study for investigating the self-heating effect in new partially insulated field-effect transistors (PiFETs) based on high-k gate dielectrics. The thermal properties have been numerically simulated and compared to those of conventional bulk-metal-oxide-semiconductor field-effect transistor (bulk-MOSFET) and PiFET structures. Several high-k materials such as ZrO2, HfO2, La2O3, and Al2O3 are used in order to test their impact on the temperature rise in the host lattice of new structures. A deal of interest has been paid to geometric parameters in the PiFET structures studied to further reduce the self-heating. The effects of geometrical and electrical parameters have been analyzed. As it is found, a significant reduction in temperature rise is achieved during high-power operation. This suggests that the insertion of high-k dielectric layers above the dioxide can mitigate the self-heating. More especially, Al2O3 has been revealed as an appropriate high-k dielectric to being recommended for the production of high-performance PiFET.
引用
收藏
页码:3522 / 3529
页数:8
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