Growth Mechanism of a Hybrid Structure Consisting of a Graphite Layer on Top of Vertical Carbon Nanotubes

被引：8

作者：

Chiodarelli, Nicolo' ^{[1
,2
]}

Xu, Cigang ^{[3
]}

Richard, Olivier ^{[1
]}

Bender, Hugo ^{[1
]}

Klekachev, Alexander ^{[1
,4
]}

Cooke, Mike ^{[3
]}

Heyns, Marc ^{[1
,5
]}

De Gendt, Stefan ^{[1
,6
]}

Groeseneken, Guido ^{[1
,2
]}

Vereecken, Philippe M. ^{[1
,7
]}

机构：

[1] IMEC, B-3001 Louvain, Belgium

[2] Katholieke Univ Leuven, Dept Elect Engn, B-3001 Louvain, Belgium

[3] Oxford Instruments Plasma Technol, Bristol BS49 4AP, Avon, England

[4] Katholieke Univ Leuven, Dept Phys & Astron, B-3001 Louvain, Belgium

[5] Katholieke Univ Leuven, Dept Met & Mat Engn, B-3001 Louvain, Belgium

[6] Katholieke Univ Leuven, Dept Chem, B-3001 Louvain, Belgium

[7] Katholieke Univ Leuven, Ctr Surface Chem & Catalysis COK, B-3001 Louvain, Belgium

来源：

JOURNAL OF NANOMATERIALS | 2012年 / 2012卷

关键词：

CHEMICAL-VAPOR-DEPOSITION; RAMAN-SPECTROSCOPY; GRAPHENE FILMS; PLASMA; NANOPARTICLES; PRETREATMENT; INTEGRATION; NUCLEATION; CATALYSTS; DIAMETER;

D O I：

10.1155/2012/130725

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Graphene and carbon nanotubes (CNTs) are both carbon-based materials with remarkable optical and electronic properties which, among others, may find applications as transparent electrodes or as interconnects in microchips, respectively. This work reports on the formation of a hybrid structure composed of a graphitic carbon layer on top of vertical CNT in a single deposition process. The mechanism of deposition is explained according to the thickness of catalyst used and the atypical growth conditions. Key factors dictating the hybrid growth are the film thickness and the time dynamic through which the catalyst film dewets and transforms into nanoparticles. The results support the similarities between chemical vapor deposition processes for graphene, graphite, and CNT.

引用

页数：10

共 51 条

[11]

Chiodarelli N., 2009, ECS T, V19, P11

[12] Integration and electrical characterization of carbon nanotube via interconnects [J].

Chiodarelli, Nicolo' ;

Li, Yunlong ;

Cott, Daire J. ;

Mertens, Sofie ;

Peys, Nick ;

Heyns, Marc ;

De Gendt, Stefan ;

Groeseneken, Guido ;

Vereecken, Philippe M. .

MICROELECTRONIC ENGINEERING, 2011, 88 (05) :837-843

[13] Measuring the electrical resistivity and contact resistance of vertical carbon nanotube bundles for application as interconnects [J].

Chiodarelli, Nicolo' ;

Masahito, Sugiura ;

Kashiwagi, Yusaku ;

Li, Yunlong ;

Arstila, Kai ;

Richard, Olivier ;

Cott, Daire J. ;

Heyns, Marc ;

De Gendt, Stefan ;

Groeseneken, Guido ;

Vereecken, Philippe M. .

NANOTECHNOLOGY, 2011, 22 (08)

[14] Growth of graphite film over the tops of vertical carbon nanotubes using Ni/Ti/Si substrate [J].

Chuang, Chia-chih ;

Liu, Wei-long ;

Chen, Wen-jauh ;

Huang, Jin-hua .

INTERNATIONAL JOURNAL OF MINERALS METALLURGY AND MATERIALS, 2009, 16 (01) :128-134

[15] Synthesis and characterization of self-organized multilayered graphene-carbon nanotube hybrid films [J].

Das, Santanu ;

Seelaboyina, Raghunandan ;

Verma, Ved ;

Lahiri, Indranil ;

Hwang, Jun Yeon ;

Banerjee, Rajarshi ;

Choi, Wonbong .

JOURNAL OF MATERIALS CHEMISTRY, 2011, 21 (20) :7289-7295

[16] Raman spectroscopy of carbon nanotubes [J].

Dresselhaus, MS ;

Dresselhaus, G ;

Saito, R ;

Jorio, A .

PHYSICS REPORTS-REVIEW SECTION OF PHYSICS LETTERS, 2005, 409 (02) :47-99

[17] Growth of high-density vertically aligned arrays of carbon nanotubes by plasma-assisted catalyst pretreatment [J].

Esconjauregui, S. ;

Bayer, B. C. ;

Fouquet, M. ;

Wirth, C. T. ;

Ducati, C. ;

Hofmann, S. ;

Robertson, J. .

APPLIED PHYSICS LETTERS, 2009, 95 (17)

[18] Interpretation of Raman spectra of disordered and amorphous carbon [J].

Ferrari, AC ;

Robertson, J .

PHYSICAL REVIEW B, 2000, 61 (20) :14095-14107

[19] Raman spectroscopy of graphene and graphite: Disorder, electron-phonon coupling, doping and nonadiabatic effects [J].

Ferrari, Andrea C. .

SOLID STATE COMMUNICATIONS, 2007, 143 (1-2) :47-57

[20] Photoconductivity of single carbon nanotubes [J].

Freitag, M ;

Martin, Y ;

Misewich, JA ;

Martel, R ;

Avouris, PH .

NANO LETTERS, 2003, 3 (08) :1067-1071

← 1 2 3 4 5 6 →