Increasing the creation yield of shallow single defects in diamond by surface plasma treatment

被引:29
作者
Osterkamp, Christian [1 ]
Scharpf, Jochen [1 ]
Pezzagna, Sebastien [2 ]
Meijer, Jan [2 ]
Diemant, Thomas [3 ]
Behm, Rolf Juergen [3 ]
Naydenov, Boris [1 ]
Jelezko, Fedor [1 ]
机构
[1] Univ Ulm, Inst Quantenopt, D-89081 Ulm, Germany
[2] Univ Leipzig, Inst Expt Phys 2, Abt Nukl Festkorperphys, D-04103 Leipzig, Germany
[3] Univ Ulm, Inst Oberflachenchem & Katalyse, D-89081 Ulm, Germany
关键词
NUCLEAR-MAGNETIC-RESONANCE; NITROGEN-VACANCY CENTERS; SPINS; IMPLANTATION;
D O I
10.1063/1.4829875
中图分类号
O59 [应用物理学];
学科分类号
摘要
Single Nitrogen-Vacancy (NV) centers in diamond close to the crystal surface are very promising magnetic field sensors with very high sensitivity. Here, we report the enhanced creation of very shallow (less than 3 nm below the diamond surface) NV centers by using fluorine and oxygen plasma treatment. We observe a four fold increase-from 0.11% to about 0.45% in the production yield when the sample surface is terminated with fluorine or oxygen atoms. This effect is explained by the stabilization of the NV's negative charge state which is influenced by the various defects present on the diamond surface. (C) 2013 AIP Publishing LLC.
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页数:4
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