Material Removal Mechanism in Jet Electrochemical Machining of Copper with Phosphoric Acid Passivation Electrolyte

被引:0
作者
Wang K. [1 ]
Yan Y. [1 ]
Zhang C. [1 ]
Liu Y.-S. [1 ]
Dong J.-T. [1 ]
Zhou P. [1 ]
Guo D.-M. [1 ]
机构
[1] Dalian University of Technology, Dalian
来源
Surface Technology | 2022年 / 51卷 / 01期
基金
中国国家自然科学基金;
关键词
Acid electrolyte; Jet electrochemical machining; Machining stability; Reaction mechanism; Surface roughness;
D O I
10.16490/j.cnki.issn.1001-3660.2022.01.018
中图分类号
学科分类号
摘要
To improve the machining stability and surface quality of jet electrochemical machining (Jet-ECM), and analyze the material removal mechanism in Jet-ECM of copper (Cu), a novel kind of phosphoric acid passivation electrolyte was used inthis paper. The novel electrolyte used phosphoric acid as a viscous film-forming agent, ethanol as a wetting agent, benzotriazole (BTA) as a corrosion inhibitor, ammonium acetate and lactic acid as surface oxide removers. The mechanism of viscous film formation was studied through the polarization curve and impedance tests, and the mechanism of ethanol and BTA were studied by cyclic voltammetry curve (CV). The research results showed that with the increase of phosphoric acid concentration, the viscous film could be effectively formed and the surface quality could be improved. Ethanol could improve the hydrophilicity of the electrolyte, which was beneficial for the discharge of products. At the same time, ethanol had a passivation effect that could improve the surface quality. The BTA protected the Cu surface through two ways: Physical film and Cu(I)-BTA polymer film. The new acid electrolyte was used for Jet-ECM of Cu, and the surface roughness of the jet center area was reduced to 14.5 nm and the surface roughness of the stray corrosion area was reduced to 157 nm after machining. Compared with traditional NaNO3 electrolyte and pure phosphoric acid electrolyte, it could effectively avoid precipitation and significantly reduce the surface roughness of the jet center and the stray corrosion area. Acid passivation electrolyte based on phosphoric acid group is adopted, it can improve the processing stability and surface quality of pure copper workpiece machined by electrochemical jet. This study improves the surface quality and stability of stress-free machining methods and has great implications for the further understanding of the electrochemical removal mechanism in Jet-ECM of Cu. © 2022, Chongqing Wujiu Periodicals Press. All rights reserved.
引用
收藏
页码:174 / 183
页数:9
相关论文
共 35 条
  • [1] LU Lei, SHEN Yong-feng, CHEN Xian-hua, Et al., Ultrahigh Strength and High Electrical Conductivity in Copper[J], Science, 304, 5669, pp. 422-426, (2004)
  • [2] DHINGRA S, HSU J F, VLASSIOUK I, Et al., Chemical Vapor Deposition of Graphene on Large-domain Ultra- flat Copper, Carbon, 69, pp. 188-193, (2014)
  • [3] JAHNES C V, COTTE J, LUND J L, Et al., Simultaneous Fabrication of RF MEMS Switches and Resonators Using Copper-based CMOS Interconnect Manufacturing Methods, 17th IEEE International Conference on Micro Electro Mechanical Systems, pp. 789-792, (2004)
  • [4] HOLMES S, KLUGMAN A, KRAATZ P., Copper Mirror Surfaces for High Power Infrared Lasers, Applied Optics, 12, 8, (1973)
  • [5] EL-GENK M S, SUSZKO A., Effects of Inclination Angle and Liquid Subcooling on Nucleate Boiling on Dimpled Copper Surfaces[J], International Journal of Heat and Mass Transfer, 95, pp. 650-661, (2016)
  • [6] JI Jing-hu, ZHOU Jia-peng, WANG Mo-yang, Et al., Effect of Initial Roughness on the Tribological Properties of Textured Surfaces with Micro-Grooves[J], Surface Technology, 48, 2, pp. 139-143, (2019)
  • [7] JIANG Fan, ZHAO Yue, HU Ji-ming, Research Advance in Application of Superhydrophobic Surfaces in Corrosion Protection of Metals[J], Surface Technology, 49, 2, pp. 109-123, (2020)
  • [8] YANG Xiao-long, LIU Xin, LU Yao, Et al., Controlling the Adhesion of Superhydrophobic Surfaces Using Electrolyte Jet Machining Techniques[J], Scientific Reports, 6, (2016)
  • [9] CHEN Guang-jun, HOU Shuai, HAN Song-xin, Research Progress on Effect of Machined Surface Quality on Corrosion Resistance[J], Surface Technology, 48, 10, pp. 25-33, (2019)
  • [10] Yang LIU, QU Ning-song, Obtaining High Surface Quality in Electrolyte Jet Machining TB6 Titanium Alloy via Enhanced Product Transport[J], Journal of Materials Processing Technology, 276, (2020)