Silicon Slot Waveguides With Low Transmission and Bending Losses at 1064 nm

被引：3

作者：

Li, Xiangdong ^{[1
]}

Feng, Xue ^{[1
]}

Xiao, Xian ^{[1
]}

Li, Yihang ^{[1
]}

Cui, Kaiyu ^{[1
]}

Liu, Fang ^{[1
]}

Huang, Yidong ^{[1
]}

机构：

[1] Tsinghua Univ, Dept Elect Engn, Tsinghua Natl Lab Informat Sci & Technol, Beijing 100084, Peoples R China

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2016年 / 28卷 / 01期

基金：

中国国家自然科学基金;

关键词：

Photonic integrated circuit; slot waveguide; transmission loss; bending loss; high absorption; CONFINING LIGHT; PHOTONICS;

D O I：

10.1109/LPT.2015.2478900

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Silicon slot waveguides operating at a wavelength of high silicon absorption are fabricated on silicon-on-insulator wafers. The measured transmission loss coefficient is as low as 6 similar to 8 dB/cm at 1064 nm, which is much lower than the material absorption. In addition, the bending loss of the slot waveguides is measured as 4.1 similar to 4.6 dB/180 degrees with a bending radius of 15 mu m. Both the transmission and bending losses are analyzed and discussed. We believe that this work could pave the way to achieve all-silicon photonic integrated circuits, which are very promising for a future on-chip chemical/biological analysis.

引用

页码：19 / 22

页数：4

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