Parylene-C diaphragm-based fiber-optic gas sensor based on photoacoustic spectroscopy

被引：1
作者：
Gong, Zhenfeng [1 ]
Gao, Tianli [1 ]
Chen, Yewei [1 ]
Jiao, Yexiang [1 ]
Chen, Ke [1 ]
Yu, Qingxu [1 ]
机构：
[1] Dalian Univ Technol, Sch Optoelect Engn & Instrumentat Sci, Dalian, Liaoning, Peoples R China
来源：
2019 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: OPTOELECTRONIC IMAGING/SPECTROSCOPY AND SIGNAL PROCESSING TECHNOLOGY | 2020年 / 11438卷
基金：
中国国家自然科学基金;
关键词：
photoacoustic spectroscopy; gas detection; Fabry-Perot; Parylene-C diaphragm;
D O I：
10.1117/12.2540483
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A low-frequency photoacoustic (PA) sensor based on Parylene-C diaphragm for micro-leakage gas detection is presented. The overall structure of the sensor head includes a cylindrical brass shell, a Parylene-C diaphragm, and a PA cavity regarded as a Fabry-Perot (F-P) cavity as well. The volume of the PA cavity is only 74 mu L. A distributed feedback (DFB) laser is used as an acoustic excitation source. The PA pressure signal is obtained by measuring the deflection of the Parylene-C diaphragm using fiber-optic white-light interference (WLI) method. The PA sensor head is used for acetylene (C2H2) detection. A detection limit of 36 parts-per-billion (ppb) is achieved when the lock-in integration time is 1 s.
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页数：6
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