Phase evolution in zirconia thin films prepared by pulsed laser deposition

被引：16

作者：

Mishra, Maneesha ^{[1
]}

Kuppusami, P. ^{[1
]}

Singh, Akash ^{[1
]}

Ramya, S. ^{[2
]}

Sivasubramanian, V. ^{[3
]}

Mohandas, E. ^{[1
]}

机构：

[1] Indira Gandhi Ctr Atom Res, Phys Met Grp, Kalpakkam 603102, Tamil Nadu, India

[2] Indira Gandhi Ctr Atom Res, Corros Sci & Technol Grp, Kalpakkam 603102, Tamil Nadu, India

[3] Indira Gandhi Ctr Atom Res, Mat Sci Grp, Kalpakkam 603102, Tamil Nadu, India

来源：

APPLIED SURFACE SCIENCE | 2012年 / 258卷 / 12期

关键词：

Zirconia; Pulsed laser deposition; Phase transformation; Crystallite size; Optical properties; CHEMICAL VAPOR-DEPOSITION; OXYGEN PARTIAL-PRESSURE; DOPED CUBIC ZIRCONIA; OXIDE-FILMS; OPTICAL-PROPERTIES; SUBSTRATE-TEMPERATURE; ELECTRICAL-PROPERTIES; STABILIZED ZIRCONIA; MONOCLINIC ZIRCONIA; TETRAGONAL ZIRCONIA;

D O I：

10.1016/j.apsusc.2012.01.160

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Zirconia thin films were deposited on silicon (1 0 0) and quartz substrates using pulsed laser deposition. Phase formation in zirconia films was monitored as a function of substrate temperature (473-973 K) and oxygen partial pressure (0.001-1 Pa). Volume fraction of tetragonal zirconia is determined from X-ray diffraction and Raman analysis. Tetragonal volume fraction of zirconia films varies from 10 to 76% for different substrate temperature and oxygen partial pressure. Zirconia films show a good transparency in the visible region, except for the films deposited at 473 K and at 0.002 Pa. The band gap values and refractive index of the films are discussed in relation with the microstructure and phase composition of the zirconia films as well as with 8 mol% yttria stabilised zirconia films. (C) 2012 Elsevier B. V. All rights reserved.

引用

页码：5157 / 5165

页数：9

共 64 条

[1] HT-XRD, IR and Raman characterization studies of metastable phases emerging in the thermal genesis course of monoclinic zirconia via amorphous zirconium hydroxide: impacts of sulfate and phosphate additives [J].

Ali, AAM ;

Zaki, MI .

THERMOCHIMICA ACTA, 2002, 387 (01) :29-38

[2] LOW-LOSS ZRO2 FILMS FOR OPTICAL APPLICATIONS IN THE UV REGION [J].

APPARAO, KVSR ;

SAHOO, NK ;

BAGCHI, TC .

THIN SOLID FILMS, 1985, 129 (3-4) :L71-L73

[3] Structure, electrical and optical properties of dc magnetron sputtered cadmium indate films: Effect of substrate temperature [J].

Babu, PM ;

Rao, GV ;

Reddy, PS ;

Uthanna, S .

MATERIALS LETTERS, 2006, 60 (02) :274-279

[4] Influence of oxygen partial pressure on the properties of pulsed laser deposited nanocrystalline zirconia thin films [J].

Balakrishnan, G. ;

Sairam, T. N. ;

Kuppusami, P. ;

Thiumurugesan, R. ;

Mohandas, E. ;

Ganesan, V. ;

Sastikumar, D. .

APPLIED SURFACE SCIENCE, 2011, 257 (20) :8506-8510

[5] A study of microstructural and optical properties of nanocrystalline ceria thin films prepared by pulsed laser deposition [J].

Balakrishnan, G. ;

Sundari, S. Tripura ;

Kuppusami, P. ;

Mohan, P. Chandra ;

Srinivasan, M. P. ;

Mohandas, E. ;

Ganesan, V. ;

Sastikumar, D. .

THIN SOLID FILMS, 2011, 519 (08) :2520-2526

[6] CHEMICAL VAPOR-DEPOSITION AND CHARACTERIZATION OF ZRO2 FILMS FROM ORGANOMETALLIC COMPOUNDS [J].

BALOG, M ;

SCHIEBER, M ;

MICHMAN, M ;

PATAI, S .

THIN SOLID FILMS, 1977, 47 (02) :109-120

[7] On Raman spectroscopy of zirconium oxide films [J].

Barberis, P ;

MerleMejean, T ;

Quintard, P .

JOURNAL OF NUCLEAR MATERIALS, 1997, 246 (2-3) :232-243

[8] Effect of substrate temperature on structural, optical and electrical properties of pulsed laser ablated nanostructured indium oxide films [J].

Beena, D. ;

Lethy, K. J. ;

Vinodkumar, R. ;

Pillai, V. P. Mahadevan ;

Ganesan, V. ;

Phase, D. M. ;

Sudheer, S. K. .

APPLIED SURFACE SCIENCE, 2009, 255 (20) :8334-8342

[9] Internal stresses and stability of the tetragonal phase in zirconia thin layers deposited by OMCVD [J].

Benali, B. ;

Huntz, A. M. ;

Andrieux, M. ;

Ignat, M. ;

Poissonnet, S. .

APPLIED SURFACE SCIENCE, 2008, 254 (18) :5807-5813

[10] Synthesis, structure, microstructure and mechanical characteristics of MO CVD deposited zirconia films [J].

Bernard, O. ;

Huntz, A. M. ;

Andrieux, M. ;

Seiler, W. ;

Ji, V. ;

Poissonnet, S. .

APPLIED SURFACE SCIENCE, 2007, 253 (10) :4626-4640

← 1 2 3 4 5 6 7 →