A New Method for Highly Efficient Fabrication of Through-Hole Porous Anodic Alumina Membranes

被引:0
|
作者
Zhang, Tao [1 ]
Ling, Zhiyuan [1 ]
Li, Yi [1 ]
Hu, Xing [1 ]
机构
[1] South China Univ Technol, Dept Elect Mat Sci & Engn, Guangzhou 510640, Guangdong, Peoples R China
关键词
TEMPLATE; ARRAYS; NANOSTRUCTURES; FACILE; FILMS;
D O I
10.1149/2.0271712jss
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Two-step anodization in 0.3 M oxalic acid electrolyte is used to grow highly ordered porous anodic alumina on both sides of Al sheet. The obtained sample is annealed and subsequently the annealed sample is re-anodized, producing two-layer PAAs on the Al. Since the re-anodized PAA has much higher etching rate than the annealed, it can be taken as a sacrificial layer to be selectively dissolved. As a result, through-hole PAAs are detached and highly ordered concaves maintain on the Al surfaces. So the Al sheet can be repeatedly used for highly efficient fabrication of through-hole PAAs. This method is also suitable for producing through-hole PAAs in other electrolytes, such as sulfuric acid and phosphoric acid. (c) 2017 The Electrochemical Society. All rights reserved.
引用
收藏
页码:P862 / P865
页数:4
相关论文
共 50 条
  • [1] Fabrication of through-hole diamond membranes by plasma etching using anodic porous alumina mask
    Masuda, H
    Yasui, K
    Watanabe, M
    Nishio, K
    Nakao, M
    Tamamura, T
    Rao, TN
    Fujishima, A
    ELECTROCHEMICAL AND SOLID STATE LETTERS, 2001, 4 (11) : G101 - G103
  • [2] A simple method for preparation of through-hole porous anodic alumina membrane
    Yuan, JH
    He, FY
    Sun, DC
    Xia, XH
    CHEMISTRY OF MATERIALS, 2004, 16 (10) : 1841 - 1844
  • [3] Fabrication of through-hole membrane with anodic alumina nanohole array
    Wang, Lei
    Nagato, Keisuke
    Iwasaki, Shiko
    Hamaguchi, Tetsuya
    Nakao, Masayuki
    MICROELECTRONIC ENGINEERING, 2015, 141 : 62 - 67
  • [4] Polymer through-hole membranes with high aspect ratios from anodic porous alumina templates
    Yanagishita, Takashi
    Nishio, Kazuyuki
    Masuda, Hideki
    Japanese Journal of Applied Physics, Part 2: Letters, 2006, 45 (42-45):
  • [5] Polymer through-hole membranes with high aspect ratios from anodic porous alumina templates
    Yanagishita, Takashi
    Nishio, Kazuyuki
    Masuda, Hideki
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2006, 45 (42-45): : L1133 - L1135
  • [6] Fabrication and properties of anodic alumina humidity sensor with through-hole structure
    Ling ZhiYuan
    Chen ShuoShuo
    Wang JinChi
    Li, Yi
    CHINESE SCIENCE BULLETIN, 2008, 53 (02): : 183 - 187
  • [8] Preparation of ideally ordered through-hole anodic porous alumina membranes by two-layer anodization
    Yanagishita, Takashi
    Kato, Atsushi
    Masuda, Hideki
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2017, 56 (03)
  • [9] Preparation of Ordered Anodic Porous Alumina Through-Hole Membrane and Its Applications
    Yanagishita, T.
    Masuda, H.
    PITS & PORES 7: NANOMATERIALS - FABRICATION PROCESSES, PROPERTIES, AND APPLICATIONS, 2016, 75 (01): : 21 - 26
  • [10] High-Throughput Fabrication Process for Highly Ordered Through-Hole Porous Alumina Membranes Using Two-Layer Anodization
    Yanagishita, Takashi
    Masuda, Hideki
    ELECTROCHIMICA ACTA, 2015, 184 : 80 - 85