Fabrication of gold nanodot array using anodic porous alumina as an evaporation mask

被引：882

作者：

Masuda, H

Satoh, M

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1996年 / 35卷 / 1B期

关键词：

nanofabrication; nanodot array; anodic porous alumina; evaporation mask; gold;

D O I：

10.1143/JJAP.35.L126

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A highly ordered gold nanodot array was fabricated by vacuum evaporation using an anodic porous alumina membrane with through-holes of nanometer scale as a mask. This technique resulted in an orderly arrangement of Au dots with a diameter of approximately 40 nm over a large area on a Si substrate.

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页码：L126 / L129

页数：4

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