Ultraprecision surface grinding of chemical vapor deposited silicon carbide for X-ray mirrors using resinoid-bonded diamond wheels

被引：24

作者：

Namba, Y ^{[1
]}

Kobayashi, H ^{[1
]}

Suzuki, H ^{[1
]}

Yamashita, K ^{[1
]}

机构：

[1] Chubu Univ, Dept Engn Mech, Aichi, Japan

来源：

CIRP ANNALS 1999 - MANUFACTURING TECHNOLOGY | 1999年

关键词：

ultra-precision surface grinding; X-ray mirror; silicon carbide;

D O I：

10.1016/S0007-8506(07)63183-7

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Chemical Vapor Deposited Silicon Carbide (CVD-SIC) on sintered silicon carbide has been ground by the ultraprecision surface grinder having a glass-ceramic spindle of extremely-low thermal expansion with various cup-type resinoid-bonded diamond wheels for getting high-brightness synchrotron radiation mirrors. The surface roughness depends upon the average grain size of a wheel, feed per wheel revolution and degree of cutting edge wear. A very smooth surface of 0.266nm rms was obtained by ultraprecision grinding without polishing. A high specular reflectivity of 88.7% at 0.834nm in wavelength was obtained on the ground surface at the grazing incident angle of 0.7-0.95 degree, parallel to the grinding direction.

引用

页码：277 / 280

页数：4

共 13 条

[1]

[Anonymous], 1993, CIRP ANN-MANUF TECHN

[2] FIXED ABRASIVE GRINDING OF CVD SIC MIRRORS [J].

BIFANO, T ;

YI, Y ;

KAHL, WK .

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1994, 16 (02) :109-116

[3] SIC, A NEW MATERIAL FOR MIRRORS .1. HIGH-POWER LASERS .2. VUV APPLICATIONS [J].

CHOYKE, WJ ;

FARICH, RF ;

HOFFMAN, RA .

APPLIED OPTICS, 1976, 15 (09) :2006-2007

[4] Effect of surface roughness and subsurface damage on grazing-incidence x-ray scattering and specular reflectance [J].

Lodha, GS ;

Yamashita, K ;

Kunieda, H ;

Tawara, Y ;

Yu, J ;

Namba, Y ;

Bennett, JM .

APPLIED OPTICS, 1998, 37 (22) :5239-5252

[5]

NAMBA Y, 1992, ANN CIRP, V41, P347

[6]

NAMBA Y, 1980, ANN CIRP, V29, P409

[7]

NAMBA Y, 1978, ANN CIRP, V28, P425

[8]

NAMBA Y, 1989, ANN CIRP, V38, P331

[9] Mirror materials for synchrotron radiation optics [J].

Paquin, RA ;

Howells, MR .

MATERIALS, MANUFACTURING, AND MEASUREMENT FOR SYNCHROTRON RADIATION MIRRORS, 1997, 3152 :2-16

[10] VACUUM ULTRAVIOLET (VUV) AND SOFT-X-RAY MIRRORS FOR SYNCHROTRON RADIATION [J].

REHN, V ;

JONES, VO .

OPTICAL ENGINEERING, 1978, 17 (05) :504-511

← 1 2 →