Ultraprecision surface grinding of chemical vapor deposited silicon carbide for X-ray mirrors using resinoid-bonded diamond wheels

被引：24

作者：

Namba, Y ^{[1
]}

Kobayashi, H ^{[1
]}

Suzuki, H ^{[1
]}

Yamashita, K ^{[1
]}

机构：

[1] Chubu Univ, Dept Engn Mech, Aichi, Japan

来源：

CIRP ANNALS 1999 - MANUFACTURING TECHNOLOGY | 1999年

关键词：

ultra-precision surface grinding; X-ray mirror; silicon carbide;

D O I：

10.1016/S0007-8506(07)63183-7

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Chemical Vapor Deposited Silicon Carbide (CVD-SIC) on sintered silicon carbide has been ground by the ultraprecision surface grinder having a glass-ceramic spindle of extremely-low thermal expansion with various cup-type resinoid-bonded diamond wheels for getting high-brightness synchrotron radiation mirrors. The surface roughness depends upon the average grain size of a wheel, feed per wheel revolution and degree of cutting edge wear. A very smooth surface of 0.266nm rms was obtained by ultraprecision grinding without polishing. A high specular reflectivity of 88.7% at 0.834nm in wavelength was obtained on the ground surface at the grazing incident angle of 0.7-0.95 degree, parallel to the grinding direction.

引用

页码：277 / 280

页数：4

共 13 条

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