Phase-shifting interferometer based on changing the direction of linear polarization orthogonally

被引:39
作者
Kiire, Tomohiro [1 ]
Nakadate, Suezou [1 ]
Shibuya, Masato [1 ]
机构
[1] Tokyo Polytech Univ, Grad Sch Engn, Dept Media Engn, Kanagawa 2430297, Japan
关键词
Incident light - Polarization - Interferometry - Interferometers;
D O I
10.1364/AO.47.003784
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We present a new type of phase-shifting interferometer, which utilizes a polarizing prism to form quadrature phase-shifted fringe patterns onto a single imaging sensor. By changing the direction of linear polarization of the incident light orthogonally, four phase-shifted fringe patterns in quadrature are obtained by taking images twice; thus it is possible to reduce phase errors caused by mechanical vibrations and air turbulence that occur in temporal phase-shifting interferometers. We present the principle of this interferometer with its theoretical analysis, using the Jones matrix, along with experimental results. (C) 2008 Optical Society of America.
引用
收藏
页码:3784 / 3788
页数:5
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