Magnetic detection of photogenerated currents in semiconductor wafers using superconducting quantum interference devices

被引：30

作者：

Beyer, J ^{[1
]}

Matz, H ^{[1
]}

Drung, D ^{[1
]}

Schurig, T ^{[1
]}

机构：

[1] Phys Tech Bundesanstalt, Inst Berlin, D-10587 Berlin, Germany

来源：

APPLIED PHYSICS LETTERS | 1999年 / 74卷 / 19期

关键词：

D O I：

10.1063/1.124039

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A completely noninvasive method is presented for the investigation of semiconductor wafers with high spatial resolution utilizing a superconducting quantum interference device (SQUID) magnetometer system. The method is based on the detection of the magnetic field caused by photocurrents generated in the semiconductor sample using a sensitive SQUID magnetometer. The photocurrents arise when laser light with a photon energy exceeding the band gap of the semiconductor is focused onto the sample surface in a region of a doping gradient. The spatial resolution of this detection method is mainly determined by the size of the excitation focus of about 20 mm. We report on measurements of silicon wafers with small growth-related doping fluctuations. (C) 1999 American Institute of Physics. [S0003-6951(99)01819-7].

引用

页码：2863 / 2865

页数：3

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