Domain decomposition and model order reduction methods applied to the simulation of multi-physics problems in MEMS

被引：33

作者：

Corigliano, Alberto ^{[1
]}

Dossi, Martino ^{[1
]}

Mariani, Stefano ^{[1
]}

机构：

[1] Politecn Milan, Dipartimento Ingn Strutturale, I-20133 Milan, Italy

来源：

COMPUTERS & STRUCTURES | 2013年 / 122卷

关键词：

MEMS; Electro-mechanical problem; Finite element method; Domain decomposition; Proper orthogonal decomposition; MECHANICAL SYSTEMS;

D O I：

10.1016/j.compstruc.2012.12.012

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

Coupled electro-mechanical problems are frequently encountered when dealing with micro electromechanical systems (MEMS) with capacitive actuation and/or readout systems; their numerical solution can be extremely time consuming, due to the nonlinearity of the coupling terms. Coupled electrostatic structural dynamic simulations are carried out in this paper through an innovative numerical procedure, based on the combined use of a domain decomposition technique and of a proper orthogonal decomposition methodology. The approach is assessed through the analysis of the dynamic response of a doubly clamped beam and of a plane resonator subjected to an electrostatic actuation, showing computational gains up to 98%. (C) 2012 Elsevier Ltd. All rights reserved.

引用

页码：113 / 127

页数：15

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