Development of a 20-MHz wide-bandwidth PMN-PT single crystal phased-array ultrasound transducer

被引:47
|
作者
Wong, Chi-Man [1 ]
Chen, Yan [2 ]
Luo, Haosu [3 ]
Dai, Jiyan [2 ]
Lam, Kwok-Ho [1 ]
Chan, Helen Lai-wa [2 ]
机构
[1] Hong Kong Polytech Univ, Dept Elect Engn, Kowloon, Hong Kong, Peoples R China
[2] Hong Kong Polytech Univ, Dept Appl Phys, Kowloon, Hong Kong, Peoples R China
[3] Chinese Acad Sci, Shanghai Inst Ceram, Informat Mat & Devices Res Ctr, Shanghai, Peoples R China
关键词
PMN-PT single crystal; High-frequency phased-array; Ultrasound transducer; HIGH-FREQUENCY; EQUIVALENT-CIRCUITS; IMAGING-SYSTEM; 30; MHZ; FABRICATION; COMPOSITE; PERFORMANCE;
D O I
10.1016/j.ultras.2016.09.012
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
In this study, a 20-MHz 64-element phased-array ultrasound transducer with a one-wavelength pitch is developed using a PMN-30%PT single crystal and double-matching layer scheme. High piezoelectric (d(33) > 1000 pC/N) and electromechanical coupling (k(33) > 0.8) properties of the single crystal with an optimized fabrication process involving the photolithography technique have been demonstrated to be suitable for wide-bandwidth (>= 70%) and high-sensitivity (insertion loss <= 30 dB) phased-array transducer application. A -6 dB bandwidth of 91% and an insertion loss of 29 dB for the 20-MHz 64-element phased-array transducer were achieved. This result shows that the bandwidth is improved comparing with the investigated high-frequency (>= 20 MHz) ultrasound transducers using piezoelectric ceramic and single crystal materials. It shows that this phased-array transducer has potential to improve the resolution of biomedical imaging, theoretically. Based on the hypothesis of resolution improvement, this phased-array transducer is capable for small animal (i.e. mouse and zebrafish) studies. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码:181 / 186
页数:6
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