ZnO/quartz structure potentiality for surface acoustic wave pressure sensor

被引：53

作者：

Talbi, A ^{[1
]}

Sarry, F ^{[1
]}

Elhakiki, M ^{[1
]}

Le Brizoual, L ^{[1
]}

Elmazria, O ^{[1
]}

Nicolay, P ^{[1
]}

Alnot, P ^{[1
]}

机构：

[1] CNRS, UMR 7040, Lab Phys Milieux Ionises & Applicat, F-54506 Vandoeuvre Les Nancy, France

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2006年 / 128卷 / 01期

关键词：

SAW; ZnO; quartz; Y-cut; TCF; K-2; pressure sensor;

D O I：

10.1016/j.sna.2006.01.008

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

It has been reported that a Rayleigh wave propagating on a zinc oxide film has a relatively low temperature coefficient of frequency (TCF) and a large electromechanical coupling factor (K-2). In this study, we investigate the performance of a SAW pressure sensor based on a ZnO/quartz structure. We used the quartz Y-X in this structure owing to the zero TCF value that this quartz produces when it is combined with a thin ZnO film of particular thickness. This film thickness was determined here not only to achieve such zero value, but also to increase the electromechanical coupling coefficient (K-2 = 1%) to seven times higher than that of quartz Y-X. The theoretical approach to select the optimal structure is presented, which is followed by discussions on the effect of the operating frequency and on the ZnO film contribution to the pressure sensitivity. (c) 2006 Elsevier B.V. All fights reserved.

引用

页码：78 / 83

页数：6

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