Tailoring growth structure, wear and corrosion properties of TiN coatings via gradient bias and arc enhanced glow discharge

被引：22
作者：
Wang, Y. H. [1 ]
Yang, Z. B. [1 ]
Hu, S. Y. [1 ]
Zhao, Y. H. [2 ]
Ren, H. [3 ]
Gong, F. [4 ]
Xie, Z. W. [1 ]
机构：
[1] Univ Sci & Technol Liaoning, Liaoning Key Lab Complex Workpiece Surface Special, Anshan 114051, Peoples R China
[2] Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China
[3] Harbin Inst Technol, Harbin 150001, Peoples R China
[4] Shenzhen Univ, Shenzhen Key Lab Adv Mfg Technol Mold & Die, Shenzhen 518060, Peoples R China
来源：
SURFACE & COATINGS TECHNOLOGY | 2022年 / 450卷
基金：
中国国家自然科学基金;
关键词：
Vacuum arc evaporation; Arc enhanced glow discharge; Gradient bias voltage; Friction and wear; MECHANICAL-PROPERTIES; TRIBOLOGICAL PROPERTIES; PVD COATINGS; MILD-STEEL; BEHAVIOR; MICROSTRUCTURE; PERFORMANCE; NITRIDE; FILMS; VOLTAGE;
D O I：
10.1016/j.surfcoat.2022.129015
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A novel tandem technique consisting of gradient bias voltage (GBV) and arc enhanced glow discharge (AEGD) was applied to tailor the growth structure, wear, and corrosion properties of TiN coatings. TiN coating without the GBV + AEGD exhibited a loose growth microstructure, which significantly degraded its barrier capacity and toughness resulting in poor resistance to wear and corrosion. The GBV + AEGD tandem technique significantly improved the densities, H/E, and H3/E2 ratios of the growth microstructure. These refined microstructures had strong barrier capacities and toughnesses, which led to significant enhancements in corrosion and wear resis-tance. The density, H/E, and H3/E2 ratios of TiN coatings gradually increased with increasing GBV times. TiN coating with the longest GBV showed better anti-wear and anti-corrosion performances.
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页数：10
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