Synthesis of Vanadium Dioxide from a Mixture of Vanadyl Acetylacetonate and Oxygen: Simulation and Experiment

被引：2

作者：

Shestakov, V. A. ^{[1
,2
]}

Yakovkina, L. V. ^{[1
]}

Kichay, V. N. ^{[1
]}

机构：

[1] Russian Acad Sci, Nikolaev Inst Inorgan Chem, Siberian Branch, Novosibirsk 630090, Russia

[2] Novosibirsk State Univ Architecture & Civil Engn, Novosibirsk 630008, Russia

来源：

RUSSIAN JOURNAL OF INORGANIC CHEMISTRY | 2022年 / 67卷 / 12期

关键词：

thermodynamic modeling; CVD process; thin films; vanadium dioxide; VO2; THIN-FILMS; PHASE; DEPOSITION; TRANSITION; OXIDES;

D O I：

10.1134/S0036023622601179

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

The thermodynamic modeling and experimental study of the synthesis of vanadium dioxide from vanadyl acetylacetonate VO(acac)(2) and oxygen in an argon atmosphere have been carried out. The method used for calculating chemical equilibria in thermodynamic modeling was based on minimizing the Gibbs energy of the system. In the experiments, chemical vapor deposition (CVD) was used to prepare films. The results of thermodynamic modeling and the obtained experimental data can be useful in developing methods for preparing films suitable for use in solid-state devices.

引用

页码：1956 / 1961

页数：6

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