Surface modifications with Lissajous trajectories using atomic force microscopy

被引:2
|
作者
Cai, Wei [1 ]
Yao, Nan [1 ]
机构
[1] Princeton Univ, Princeton Inst Sci & Technol Mat, Princeton, NJ 08544 USA
基金
美国国家科学基金会;
关键词
NANOLITHOGRAPHY;
D O I
10.1063/1.4931087
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this paper, we report a method for atomic force microscopy surface modifications with single-tone and multiple-resolution Lissajous trajectories. The tip mechanical scratching experiments with two series of Lissajous trajectories were carried out on monolayer films. The scratching processes with two scan methods have been illustrated. As an application, the tip-based triboelectrification phenomenon on the silicon dioxide surface with Lissajous trajectories was investigated. The triboelectric charges generated within the tip rubbed area on the surface were characterized in-situ by scanning Kelvin force microscopy. This method would provide a promising and cost-effective approach for surface modifications and nanofabrication. (c) 2015 AIP Publishing LLC.
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页数:4
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