Condensation of vapor and nanoclusters formation within the vapor plume, produced by ns-laser ablation of Si, Ge and C

被引:31
作者
Luk'yanchuk, BS [1 ]
Marine, W [1 ]
Anisimov, SI [1 ]
Simakina, GA [1 ]
机构
[1] Russian Acad Sci, Inst Gen Phys, Moscow 117942, Russia
来源
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING IV | 1999年 / 3618卷
关键词
laser ablation; silicon clusters; nanocrystals; theory of condensation; photoluminescence;
D O I
10.1117/12.352703
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The condensation of vapor within the expanding plume produced by ns-laser ablation is discussed in the frame of Zeldovich and Raizer theory of condensation. The calculations have been performed for Si, Ge and C -vapors. Tt is shown that the size of clusters formed during the condensation is very small, typically of the order of few nanometers. The averaged cluster radius is calculated for different temperatures and densities of the initial plume. The generalisation of the theory is made for inhomogeneous plume where the rates of nucleation as well as condensation times are different sit different parts of the plume. The size distribution function is calculated for the plume expansion into vacuum. For the clusters moving together with vapor one can distinguish three different waves propagating through the plume: (1) The saturation wave, where the vapor becomes saturated, (2) The supercooling wave, where the highest supercooling is reached, and (3) The quenching wave, where the growth of cluster stops. The last stage of cluster formation is related to cooling of clusters and their crystallisation. This leads to delay in photoluminescence signal with typical delay time from 0.1 to 7 ms depending on the type of the background gas and its pressure.
引用
收藏
页码:434 / 452
页数:19
相关论文
共 46 条
[1]   GAS-DYNAMICS AND FILM PROFILES IN PULSED-LASER DEPOSITION OF MATERIALS [J].
ANISIMOV, SI ;
BAUERLE, D ;
LUKYANCHUK, BS .
PHYSICAL REVIEW B, 1993, 48 (16) :12076-12081
[2]  
[Anonymous], SOV PHYS JETP
[3]  
[Anonymous], 1994, SPRINGER SERIES CHEM
[4]  
BASHKIROV AG, 1995, NONEQUILIBRIUM STAT
[5]  
Becker R, 1935, ANN PHYS-BERLIN, V24, P719
[6]   Modeling of the expansion of laser-evaporated matter in argon, helium and nitrogen and the condensation of clusters [J].
Callies, G ;
Schittenhelm, H ;
Berger, P ;
Hugel, H .
APPLIED SURFACE SCIENCE, 1998, 127 :134-141
[7]   Blackbody emission under laser excitation of silicon nanopowder produced by plasma-enhanced chemical-vapor deposition [J].
Costa, J ;
Roura, P ;
Morante, JR ;
Bertran, E .
JOURNAL OF APPLIED PHYSICS, 1998, 83 (12) :7879-7885
[8]  
Frenkel Ya.I., 1955, Kinetic theory of liquids
[9]   Time-resolved imaging of gas phase nanoparticle synthesis by laser ablation [J].
Geohegan, DB ;
Puretzky, AA ;
Duscher, G ;
Pennycook, SJ .
APPLIED PHYSICS LETTERS, 1998, 72 (23) :2987-2989
[10]  
GEOHEGAN DB, 1998, PHOTOLUMINESCENCE GA, V73, P371