Ion-induced particle desorption in time-of-flight medium energy ion scattering

被引：9

作者：

Lohmann, S. ^{[1
]}

Primetzhofer, D. ^{[1
]}

机构：

[1] Uppsala Univ, Angstrom Lab, Dept Phys & Astron, Box 516, SE-75120 Uppsala, Sweden

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2018年 / 423卷

关键词：

Desorption; Electronic sputtering; TOF-MEIS; TiN; MASS-SPECTROMETRY; NITROGEN; OXYGEN;

D O I：

10.1016/j.nimb.2018.02.016

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Secondary ions emitted from solids upon ion impact are studied in a time-of-flight medium energy ion scattering (ToF-MEIS) set-up. In order to investigate characteristics of the emission processes and to evaluate the potential for surface and thin film analysis, experiments employing TiN and Al samples were conducted. The ejected ions exhibit a low initial kinetic energy of a few eV, thus, requiring a sufficiently high acceleration voltage for detection. Molecular and atomic ions of different charge states originating both from surface contaminations and the sample material are found, and relative yields of several species were determined. Experimental evidence that points towards a predominantly electronic sputtering process is presented. For emitted Ti target atoms an additional nuclear sputtering component is suggested.

引用

页码：22 / 26

页数：5

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