Wavefront reconstruction algorithm based on interpolation coefficients for radial shearing interferometry

被引：0
作者：
Zhang, Chen [1 ]
Li, Dahai [1 ]
Li, Mengyang [1 ]
Kewei, E. [1 ]
机构：
[1] Sichuan Univ, Coll Elect & Informat Engn, Chengdu 610065, Peoples R China
来源：
OPTICAL MEASUREMENT TECHNOLOGY AND INSTRUMENTATION | 2016年 / 10155卷
关键词：
Metrology; Interferometry; Phase measurement; LASER;
D O I：
10.1117/12.2247361
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A new wavefront reconstruction algorithm for radial shearing interferometer is proposed. Based on the shearing relationship between the expanded wavefront and the test wavefront, the interpolation coefficient matrix are established by the radial shearing ratio and the number of discrete points of test wavefront. Accordingly, the expanded wavefront can be described by an interpolation coefficient matrix and the test wavefront. Then the test wavefront can be calculated from the phase difference wavefront which comes from any radial shearing interferometer. The numerical simulation proves the correctness of the algorithm. The main error source of this algorithm has been analyzed and the error propagation coefficient has been calculated at last. Above results show that the proposed algorithm is an effective and correct algorithm to reconstruct wavefront for radial shearing interferometer.
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页数：8
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