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Importance of Solvent Evaporation Temperature in Pre-Annealing Stage for Solution-Processed Zinc Tin Oxide Thin-Film Transistors
被引:4
作者:

Jeon, Sang-Hwa
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Kyungpook Natl Univ, Sch Elect & Elect Engn, Daegu 41566, South Korea Kyungpook Natl Univ, Sch Elect & Elect Engn, Daegu 41566, South Korea

Wang, Ziyuan
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Kyungpook Natl Univ, Sch Elect & Elect Engn, Daegu 41566, South Korea Kyungpook Natl Univ, Sch Elect & Elect Engn, Daegu 41566, South Korea

Seo, Kyeong-Ho
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Kyungpook Natl Univ, Sch Elect & Elect Engn, Daegu 41566, South Korea Kyungpook Natl Univ, Sch Elect & Elect Engn, Daegu 41566, South Korea

Feng, Junhao
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Kyungpook Natl Univ, Sch Elect & Elect Engn, Daegu 41566, South Korea Kyungpook Natl Univ, Sch Elect & Elect Engn, Daegu 41566, South Korea

Zhang, Xue
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Shangdong Univ Sci & Technol, Coll Ocean Sci & Engn, Qingdao 266590, Peoples R China Kyungpook Natl Univ, Sch Elect & Elect Engn, Daegu 41566, South Korea

Park, Jaehoon
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Hallym Univ, Dept Elect Engn, Chuncheon 24252, Peoples R China Kyungpook Natl Univ, Sch Elect & Elect Engn, Daegu 41566, South Korea

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机构:
[1] Kyungpook Natl Univ, Sch Elect & Elect Engn, Daegu 41566, South Korea
[2] Shangdong Univ Sci & Technol, Coll Ocean Sci & Engn, Qingdao 266590, Peoples R China
[3] Hallym Univ, Dept Elect Engn, Chuncheon 24252, Peoples R China
[4] Kyungpook Natl Univ, Sch Elect Engn, Daegu 41566, Peoples R China
来源:
基金:
新加坡国家研究基金会;
关键词:
amorphous oxide semiconductors;
zinc tin oxide;
solution process;
thin-film transistor;
pre-annealing;
PERFORMANCE;
LAYER;
D O I:
10.3390/electronics11182822
中图分类号:
TP [自动化技术、计算机技术];
学科分类号:
0812 ;
摘要:
We focused on the importance of solvent evaporation governed by the temperature of the pre-annealing stage (T-S) in solution-processed zinc tin oxide (ZTO) thin-film transistors (TFTs). We controlled T-S based on the boiling point (B-P) of the solvent used. When T-S reaches the B-P, the field effect mobility is found to be about 1.03 cm2/V s, which is 10 times larger than the T-S < B-p case (0.13 cm(2)/V s). The reason is presumed to be that residual organic defects are effectively removed as T-S increases. In addition, when Ts is beyond B-p, the mobility is rather decreased due to structural defects such as pores and pinholes. Based on our results, it is noted that T-S plays a significant role in the enhancement of electrical performance and stability of solution-processed ZTO TFTs.
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页数:10
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