Importance of Solvent Evaporation Temperature in Pre-Annealing Stage for Solution-Processed Zinc Tin Oxide Thin-Film Transistors

被引:4
作者
Jeon, Sang-Hwa [1 ]
Wang, Ziyuan [1 ]
Seo, Kyeong-Ho [1 ]
Feng, Junhao [1 ]
Zhang, Xue [2 ]
Park, Jaehoon [3 ]
Bae, Jin-Hyuk [1 ,4 ]
机构
[1] Kyungpook Natl Univ, Sch Elect & Elect Engn, Daegu 41566, South Korea
[2] Shangdong Univ Sci & Technol, Coll Ocean Sci & Engn, Qingdao 266590, Peoples R China
[3] Hallym Univ, Dept Elect Engn, Chuncheon 24252, Peoples R China
[4] Kyungpook Natl Univ, Sch Elect Engn, Daegu 41566, Peoples R China
基金
新加坡国家研究基金会;
关键词
amorphous oxide semiconductors; zinc tin oxide; solution process; thin-film transistor; pre-annealing; PERFORMANCE; LAYER;
D O I
10.3390/electronics11182822
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
We focused on the importance of solvent evaporation governed by the temperature of the pre-annealing stage (T-S) in solution-processed zinc tin oxide (ZTO) thin-film transistors (TFTs). We controlled T-S based on the boiling point (B-P) of the solvent used. When T-S reaches the B-P, the field effect mobility is found to be about 1.03 cm2/V s, which is 10 times larger than the T-S < B-p case (0.13 cm(2)/V s). The reason is presumed to be that residual organic defects are effectively removed as T-S increases. In addition, when Ts is beyond B-p, the mobility is rather decreased due to structural defects such as pores and pinholes. Based on our results, it is noted that T-S plays a significant role in the enhancement of electrical performance and stability of solution-processed ZTO TFTs.
引用
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页数:10
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共 27 条
[1]   A review on the recent developments of solution processes for oxide thin film transistors [J].
Ahn, Byung Du ;
Jeon, Hye-Ji ;
Sheng, Jiazhen ;
Park, Jozeph ;
Park, Jin-Seong .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2015, 30 (06)
[2]   Enhanced electrical properties of oxide semiconductor thin-film transistors with high conductivity thin layer insertion for the channel region [J].
Cam Phu Thi Nguyen ;
Raja, Jayapal ;
Kim, Sunbo ;
Jang, Kyungsoo ;
Le, Anh Huy Tuan ;
Lee, Youn-Jung ;
Yi, Junsin .
APPLIED SURFACE SCIENCE, 2017, 396 :1472-1477
[3]   Transparent ZnO Thin-Film Deposition by Spray Pyrolysis for High-Performance Metal-Oxide Field-Effect Transistors [J].
Cho, Junhee ;
Hwang, Seongkwon ;
Ko, Doo-Hyun ;
Chung, Seungjun .
MATERIALS, 2019, 12 (20)
[4]   A Sustainable Approach to Flexible Electronics with Zinc-Tin Oxide Thin-Film Transistors [J].
Fernandes, Cristina ;
Santa, Ana ;
Santos, Angelo ;
Bahubalindruni, Pydi ;
Deuermeier, Jonas ;
Martins, Rodrigo ;
Fortunato, Elvira ;
Barquinha, Pedro .
ADVANCED ELECTRONIC MATERIALS, 2018, 4 (07)
[5]   Oxide Semiconductor Thin-Film Transistors: A Review of Recent Advances [J].
Fortunato, E. ;
Barquinha, P. ;
Martins, R. .
ADVANCED MATERIALS, 2012, 24 (22) :2945-2986
[6]   In-Ga-Zn oxide nanoparticles acting as an oxide semiconductor material synthesized via a coprecipitation-based method [J].
Fukuda, Nobuko ;
Watanabe, Yuichi ;
Uemura, Sei ;
Yoshida, Yuji ;
Nakamura, Takashi ;
Ushijima, Hirobumi .
JOURNAL OF MATERIALS CHEMISTRY C, 2014, 2 (13) :2448-2454
[7]   Inkjet-Printed Ternary Oxide Dielectric and Doped Interface Layer for Metal-Oxide Thin-Film Transistors with Low Voltage Operation [J].
Gillan, Liam ;
Li, Shujie ;
Lahtinen, Jouko ;
Chang, Chih-Hung ;
Alastalo, Ari ;
Leppaniemi, Jaakko .
ADVANCED MATERIALS INTERFACES, 2021, 8 (12)
[8]   Accelerated Formation of Metal Oxide Thin Film at 200 °C Using Oxygen Supplied by a Nitric Acid Additive and Residual Organic Suction Vacuum Annealing for Thin-Film Transistor Applications [J].
Jeong, Woong Hee ;
Kim, Dong Lim ;
Kim, Hyun Jae .
ACS APPLIED MATERIALS & INTERFACES, 2013, 5 (18) :9051-9056
[9]   Light-induced hysteresis and recovery behaviors in photochemically activated solution-processed metal-oxide thin-film transistors [J].
Jo, Jeong-Wan ;
Kim, Yong-Hoon ;
Park, Sung Kyu .
APPLIED PHYSICS LETTERS, 2014, 105 (04)
[10]   Material characteristics and applications of transparent amorphous oxide semiconductors [J].
Kamiya, Toshio ;
Hosono, Hideo .
NPG ASIA MATERIALS, 2010, 2 (01) :15-22