[1] City Univ Hong Kong, Dept Mech & Biomed Engn, Kowloon, Hong Kong, Peoples R China
[2] Fraunhofer Inst Elect Nano Syst Fraunhofer ENAS, D-09126 Chemnitz, Germany
[3] Tech Univ Chemnitz, Ctr Microtechnol ZfM, D-09126 Chemnitz, Germany
[4] Chinese Acad Sci, Grad Univ, Beijing, Peoples R China
[5] Chinese Acad Sci, State Key Lab Robot, Shenyang Inst Automat, Shenyang 110016, Peoples R China