Evolution of discharge structure in capacitive radio-frequency atmospheric microplasmas

被引:126
作者
Shi, JJ [1 ]
Kong, MG [1 ]
机构
[1] Loughborough Univ Technol, Dept Elect & Elect Engn, Loughborough LE11 3TU, Leics, England
关键词
D O I
10.1103/PhysRevLett.96.105009
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Conventional radio-frequency (rf) nonthermal atmospheric plasmas are generated in a millimeter gap. In this Letter, we present a self-consistent numerical study of rf atmospheric microplasmas in a submillimeter gap comparable to their sheath thickness. It is shown that the narrow electrode gap deforms the discharge structure, ultimately removing the bulk-plasma region and disabling electron trapping. Significantly, these properties permit rf atmospheric microplasmas to operate at very high current densities thus simultaneously achieving higher stability and greater chemical reactivity.
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页数:4
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