We report enhancement of L2(1) order and the resultant improvement of spin polarization of Co2MnSi (CMS) Heusler alloy thin films by a small amount of Ag alloying (x(Ag) <= 4.5 atomic (at.) %). The degree of L2(1) order in CMS increases with x(Ag)(=2.7 at.% and 4.5 at.%), which shows a positive correlation with the magnitude of negative anisotropic magnetoresistance ratio, suggesting the enhancement of spin polarization. Since the benefit of Ag-doping was confirmed even at low annealing temperature around 350 degrees C, this method could be useful for processing spintronic devices using Heusler alloys at relatively low annealing or substrate temperature. (C) 2015 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.