Ultra-smooth micro-optical components of various geometries

被引：22
|
作者：
Liu, Xue-Qing [1 ]
Yang, Shuang-Ning [2 ]
Sun, Yun-Lu [2 ]
Yu, Lei [2 ]
Bai, Ben-Feng [1 ]
Chen, Qi-Dai [2 ]
Sun, Hong-Bo [1 ,2 ]
机构：
[1] Tsinghua Univ, Dept Precis Instrument, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China
[2] Jilin Univ, Coll Elect Sci & Engn, State Key Lab Integrated Optoelect, Changchun 130012, Jilin, Peoples R China
来源：
OPTICS LETTERS | 2019年 / 44卷 / 10期
基金：
中国博士后科学基金; 中国国家自然科学基金;
关键词：
FABRICATION; LITHOGRAPHY;
D O I：
10.1364/OL.44.002454
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A dry-etching-assisted femtosecond laser lithography technology is proposed to in-site fabricate micro-optical components with an ultra-smooth three-dimensional continuous profile on a non-planar substrate. Owing to the nanometric resolution of femtosecond laser multi-photon polymerization and dry etching, smooth micro-optical components can be realized on hard materials with surface roughness of approximately 1.5 nm. With flexible and arbitrary designability of femtosecond laser lithography, various high-quality micro-optical components are realized on sapphire. These results indicate that dry-etching-assisted femtosecond laser lithography has promising potential for versatile fabrication of arbitrary ultra-smooth micro/nanostructures on hard materials. (C) 2019 Optical Society of America
引用
收藏
页码：2454 / 2457
页数：4
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