Structured films of light-emitting silicon nanoparticles produced by cluster beam deposition

被引：52

作者：

Huisken, F

Kohn, B

Paillard, V

机构：

[1] Max Planck Inst Stromungsforsch, D-37073 Gottingen, Germany

[2] Univ Toulouse 3, Phys Solides Lab, F-31062 Toulouse 4, France

来源：

APPLIED PHYSICS LETTERS | 1999年 / 74卷 / 25期

关键词：

D O I：

10.1063/1.124176

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Crystalline silicon nanoparticles (quantum dots) with diameters around 4 nm are produced via CO2-laser-induced decomposition of SiH4 in a flow reactor and subsequently transferred into a freely propagating cluster beam. Thin structured films are then obtained by shaping the beam with a mask and depositing the nanoclusters at low energy on a sapphire substrate. Upon illumination with ultraviolet radiation, the nanoparticles exhibit strong photoluminescence in the red. (C) 1999 American Institute of Physics. [S0003-6951(99)00925-0].

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页码：3776 / 3778

页数：3

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