Physical Chemistry;
Beam Diameter;
Plasma Electron;
Focus Beam;
Electron Source;
D O I:
10.1007/s10786-005-0137-4
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
A plasma electron source is described that forms a focused beam in the range of fore-pump pressures. Plasma is generated in a hollow-cathode discharge. Electrons are extracted through a single emission hole in the anode. The source provides an electron-beam current of up to 0.1 A and an energy of up to 20 keV. The beam diameter at the half-height of the current-density distribution is <= 1.4 mm, and the beam-power density is as high as 1.5 kW/mm(2).