A plasma-cathode electron source for focused-beam generation in the fore-pump pressure range

被引:21
作者
Burdovitsin, VA [1 ]
Zhirkov, IS [1 ]
Oks, EM [1 ]
Osipov, IV [1 ]
Fedorov, MV [1 ]
机构
[1] Tomsk State Univ, Tomsk 634050, Russia
基金
俄罗斯基础研究基金会;
关键词
Physical Chemistry; Beam Diameter; Plasma Electron; Focus Beam; Electron Source;
D O I
10.1007/s10786-005-0137-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A plasma electron source is described that forms a focused beam in the range of fore-pump pressures. Plasma is generated in a hollow-cathode discharge. Electrons are extracted through a single emission hole in the anode. The source provides an electron-beam current of up to 0.1 A and an energy of up to 20 keV. The beam diameter at the half-height of the current-density distribution is <= 1.4 mm, and the beam-power density is as high as 1.5 kW/mm(2).
引用
收藏
页码:761 / 763
页数:3
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